中国科学院机构知识库网格
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Applying observer feedback in motor control (EI CONFERENCE) 会议论文  OAI收割
3rd International Conference on Measuring Technology and Mechatronics Automation, ICMTMA 2011, January 6, 2011 - January 7, 2011, Shanghai, China
Huan Z.-Y.; Li H.-W.
收藏  |  浏览/下载:11/0  |  提交时间:2013/03/25
White-light spectral scanning interferometry for surface measurement system (EI CONFERENCE) 会议论文  OAI收割
6th International Symposium on Precision Engineering Measurements and Instrumentation, August 8, 2010 - August 11, 2010, Hangzhou, China
作者:  
Wang C.
收藏  |  浏览/下载:27/0  |  提交时间:2013/03/25
The paper introduces the white-light spectral scanning interferometry for surface measurement. This interferometry can be used to measure the roughness of both smooth surfaces and those with large step heights. This real-time surface measurement can be achieved using acousto-optic tuneable filtering (AOTF) technique without mechanical scanning. At first  the structure and principle of this interferometry is introduced. Then the algorithm of the surface roughness measurement is proposed. What's more  the experiment with standard test piece is conducted. Compared with the traditional laser-light interferometry  the data shows that the proposed method has a higher accuracy which is proved to be nano-scale. A conclusion is given at last in which the superiorities and the limitations of the proposed system were discussed. 2010 SPIE.