机构

• 长春光学精密机械与物... [2]
• 金属研究所 [1]
• 苏州纳米技术与纳米仿... [1]

采集方式

• OAI收割 [4]

内容类型

• 会议论文 [2]
• 期刊论文 [2]

发表日期

• 2015 [1]
• 2010 [1]
• 2007 [1]
• 2005 [1]

学科主题

筛选

浏览/检索结果: 共4条，第1-4条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Micro-electro-mechanical systems capacitive ultrasonic transducer with a higher electromechanical coupling coefficient 期刊论文  OAI收割 Micro & Nano Letters, 2015, 卷号: 10, 期号: 10, 页码: 4 作者:  Miao, J(苗静);  Shen, WJ(沈文江);  He, CD;  Xue, CY;  Xiong, JJ 收藏  |  浏览/下载：84/0  |  提交时间：2015/12/31 silicon  elemental semiconductors  silicon-on-insulator  wafer bonding  electromechanical effects  ultrasonic transducers  capacitive transducers  micromechanical devices  micromachining  vibrations  membranes  finite element analysis  reliability  capacitance  electromechanical coupling coefficient  capacitive micromachined ultrasonic transducer  impedance matching  propagation medium  microelectromechanical system capacitive ultrasonic transducer  silicon on insulator  wafer bonding  optimum geometric dimensions  membrane mechanical vibration  electrical characteristics  finite-element analysis  operation mode  device safety  device reliability  equivalent stress  operation-collapse voltage  bottom electrodes  glass substrate surface  parallel parasitic capacitance  Si  SiO2   ZnO films growth at different temperature on the substrate of Corning glass by MOCVD (EI CONFERENCE) 会议论文  OAI收割 2009 International Symposium on Liquid Crystal Science and Technology, August 2, 2009 - August 5, 2009, Kunming, China 作者:  Zhao J.;  Gao X.;  Wang C.;  Tang W. 收藏  |  浏览/下载：25/0  |  提交时间：2013/03/25 We deposited ZnO films on Corning glass substrate by metal-organic chemical vapor deposition (MOCVD). We found the diffraction (002) peak at ~34.46  indicating that the ZnO thin films were C-oriented. ZnO films were highly transparent with a transmission ratio larger than 85% in the visible range. The surface morphology of the films was observed by atomic force microscopy (AFM). (2010) Trans Tech Publications.   Photocatalytic performance of TiO2 thin films deposited on glass and quartz substrates 期刊论文  OAI收割 Chinese Journal of Catalysis, 2007, 卷号: 28, 期号: 3, 页码: 269-273 W. J. Zhang; S. L. Zhu; Y. Li; F. H. Wang; H. B. He 收藏  |  浏览/下载：27/0  |  提交时间：2012/04/13 reactive magnetron sputtering  titania  thin film  glass  quartz  substrate  photocatalysis  methyl orange  degradation  phase  oxidation  catalysts  surface   Application of photoresist melting method to the fabrication of holographic grating (EI CONFERENCE) 会议论文  OAI收割 ICO20: Optical Devices and Instruments, August 21, 2005 - August 26, 2005, Changchun, China 作者:  Li W.;  Tang Y.;  Yu H.;  Gao J.;  Li W. 收藏  |  浏览/下载：61/0  |  提交时间：2013/03/25 A new technique of reducing surface roughness of photoresist grating is presented. In this paper  photoresist melting method  which is low-cost  short-period and easy realization  is presented. In addition  the influence of photoresist melting on the groove profile of the photoresist grating is investigated. Experimental results show that the surface roughness reduces due to surface tension  when developed photoresist is heated to be melting state by this method. In experiment  when the melted photoresist grating is etched by ion beam  the surface relief grating possessing preferable groove profile is obtained on K9 glass substrate  then the surface is evaporated by aluminum using vacuum evaporation  holographic grating with preferable groove profile is successively fabricated.