中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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表面缺陷视觉检测关键技术研究 学位论文  OAI收割
工学博士, 中国科学院自动化研究所: 中国科学院研究生院, 2010
作者:  
丁名晓
收藏  |  浏览/下载:117/0  |  提交时间:2015/09/02
The automatic photoresist coating machine on the spherical surface (EI CONFERENCE) 会议论文  OAI收割
2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009, August 9, 2009 - August 12, 2009, Changchun, China
作者:  
Li Y.;  Li Y.;  Li Y.;  Li Y.;  Wang H.
收藏  |  浏览/下载:21/0  |  提交时间:2013/03/25
The photoresist coating is an important micro machining process widely applied in engineering. The formed film should be uniform and enough thin to assure the quality of final pattern whose line width is micrometer or nanometer. It is more difficult to process it on the spherical surface than on the flat. In this work  mathematic model of film thickness on the spherical surface is proposed by using hydromechanics. The key factors that influence the film thickness are obtained from the analysis of coating process. Then  the rational parameters which be controlled by the automatic photoresist coating machine can be final set up according to the result of the coating experiments. And the accuracy analysis of the key part which is used for the main process is performed by the error analytics. This machine not only makes the whole coating process automation  but also monitors the film quality in real time. It is adequate for aspheric surface also. 2009 IEEE.