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	Manufacturing and testing of the line-array fiber-optic image slicer based on silicon V-grooves (EI CONFERENCE) 会议论文 OAI收割 MEMS/MOEMS Technologies and Applications III, November 12, 2007 - November 14, 2007, Beijing, China 作者: Zhu Y. 收藏 \| 浏览/下载：22/0 \| 提交时间：2013/03/25 Linear fiber-optic image slicer is used more and more in spatial exploration and imaging system. In this paper a plane arranging method of fiber-optic array based on Si-V grooves is established in order to improve the accuracy and reduce the cost of manufacturing. Firstly the Si-V groove array is micro-machined with anisotropic etching process then optical fibers are placed in the grooves orderly with plane arranging method. Secondly the end surfaces of the device are polished also the linear fiber-optic image slicer is packaged. Finally some parameters are tested including structure parameters transmittivity and vibration test. Experimental results indicate that the maximum error accumulated in 2000 periods of the Si-V grooves is 0.5 m the error of the height in Si-V grooves is less than 0.15m the roughness of the end surface is less than 0.9nm. The transmittivity of the linear fiber-optic image slicer that without optical film is 51.46% at the wavelength of 632.8nm. After random vibration experiment the ratio of the broken fiber increased by 0.1%. While the temperature reached 320C the stress of epoxy will be 130Mpa which is close to the limit resistance stress of 139Mpa some cracks appeared.
	Research on micro-optical lenses fabrication technology 期刊论文 OAI收割 optik, 2007, 卷号: 118, 期号: 8, 页码: 395-401 作者: Li Yulin; Li Tonghai; Jiao Guohua; Hu Baowen; Huo Junmin 收藏 \| 浏览/下载：120/2 \| 提交时间：2010/01/12 gradient index material ion exchange micro-optics lens micro-jet printing micro-structure optical device
	Study on the fabrication of orange micro-LED arrays for display (EI CONFERENCE) 会议论文 OAI收割 ICO20: Display Devices and Systems, August 21, 2005 - August 26, 2005, Changchun, China 作者: Li J.; Wang W.; Wang W.; Zhao L.; Li J. 收藏 \| 浏览/下载：32/0 \| 提交时间：2013/03/25 Arrays of micro-sized LEDs which can be used as microdisplays have been demonstrated in recent years. In order to reduce the input and output connections to the arrays we employ a matrix addressable architecture in which all the pixels in each row are connected by a common metal line on the top of the window layer (top electrode) or at the base of substrate(bottom electrode). Decreasing the size of electrodes makes for minimizing the size of device. The optic and electric isolation and good ohmic contact are also helpful to obtain superior optical and electrical performance. We describe a procedure of fabrication of AlGalnP-based orange micro-LED by wet etching. The structure of devices is etched using both isotropic and anisotropic etchant. The pixel size is about 16um 20um and there are 1000 818 pixels in the light emitting chip whose diagonal is 1-in.
	Integrated mach-zehnder micro-interferometer for gas trace remote sensing (EI CONFERENCE) 会议论文 OAI收割 ICO20: Remote Sensing and Infrared Devices and Systems, August 21, 2005 - August 26, 2005, Changchun, China 作者: Wang P. 收藏 \| 浏览/下载：42/0 \| 提交时间：2013/03/25 The realisation process and the preliminary tests on the performances of an integrated Mach-Zehnder Interferometer on LiNbO3 (Lithium Niobate) substrate is presented. The microsystem has been obtained by using medium mass Ion Implantation on X-cut Lithium Niobate crystals. The interferometer is formed by integrated optical channel waveguides: the phase shift between the two optical paths has been obtained 1mm 2 cross section and weights a few grams. The power consumption is in the milliwatt range. In the present work results obtained in the spectral window (0.4m-1.1m) will be presented. The performance of the device without moving parts evaluated on standard radiation sources by applying a suitable electric field. The whole device is 60mm long demonstrates that a spectral resolution better than 0.3nm can be obtained on 400nm spectral windows. The Micro-interferometer has been tested in laboratory with a calibrated cell containing NO2 gas and has demonstrated sensitivity in the ppb range if suitable optical paths are used. Its reduced dimensions and weights make these micro-systems ideal for a wide range of applications has a 0.57times spanning from Space Technology Earth observation for Environment monitoring to Safety and Security applications.
	Study of micro-actuator with electrostatic actuating (EI CONFERENCE) 会议论文 OAI收割 ICO20: MEMS, MOEMS, and NEMS, August 21, 2005 - August 26, 2005, Changchun, China 作者: Liu C.-X.; Liu C.-X. 收藏 \| 浏览/下载：17/0 \| 提交时间：2013/03/25 The micro-actuator with the torsion beam and the cantilever beam on silicon is designed and analyzed which is actuated by electrostatic force. Based on the torsion dynamics theory the technique and relative formula are presented for analyzing the actuating voltage and the switching time on which the effect of the air squeeze film damping is already considered. The optimized results of the structural parameters are compared between this technique and the finite element modeling (FEM). The optimized result of parameters is as: length width and thickness of the torsion beam are 700 12 and 10m length and width of the cantilever beam are 1900 and 1000m length and width of the balance beam are 100 and 1000m and distance of the upper and lower electrodes is 55m respectively. The actuating voltage is about 50 V and the switching time Toff and Ton are about 5 and 12 ms respectively. The computed results show that the air squeeze film damping is an important factor for the study of dynamic response on micro-actuator. Finally an optical technique is described for the measurement of the actuating voltage and switching time of the device and the difference between the experimental results and theoretical datum is discussed.
	衍射透镜焦斑的非迭代相干检测研究学位论文 OAI收割作者: 王松贤 \| 收藏 \| 浏览/下载：49/0 \| 提交时间：2018/12/26 衍射透镜 diffractive lenses 数字全息 digital holography, 微光器件 micro-optical device, 光子筛 photon sieve, 自动对焦 autofocus