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	Manufacturing and testing of the line-array fiber-optic image slicer based on silicon V-grooves (EI CONFERENCE) 会议论文 OAI收割 MEMS/MOEMS Technologies and Applications III, November 12, 2007 - November 14, 2007, Beijing, China 作者: Zhu Y. 收藏 \| 浏览/下载：22/0 \| 提交时间：2013/03/25 Linear fiber-optic image slicer is used more and more in spatial exploration and imaging system. In this paper a plane arranging method of fiber-optic array based on Si-V grooves is established in order to improve the accuracy and reduce the cost of manufacturing. Firstly the Si-V groove array is micro-machined with anisotropic etching process then optical fibers are placed in the grooves orderly with plane arranging method. Secondly the end surfaces of the device are polished also the linear fiber-optic image slicer is packaged. Finally some parameters are tested including structure parameters transmittivity and vibration test. Experimental results indicate that the maximum error accumulated in 2000 periods of the Si-V grooves is 0.5 m the error of the height in Si-V grooves is less than 0.15m the roughness of the end surface is less than 0.9nm. The transmittivity of the linear fiber-optic image slicer that without optical film is 51.46% at the wavelength of 632.8nm. After random vibration experiment the ratio of the broken fiber increased by 0.1%. While the temperature reached 320C the stress of epoxy will be 130Mpa which is close to the limit resistance stress of 139Mpa some cracks appeared.
	Research on micro-optical lenses fabrication technology 期刊论文 OAI收割 optik, 2007, 卷号: 118, 期号: 8, 页码: 395-401 作者: Li Yulin; Li Tonghai; Jiao Guohua; Hu Baowen; Huo Junmin 收藏 \| 浏览/下载：120/2 \| 提交时间：2010/01/12 gradient index material ion exchange micro-optics lens micro-jet printing micro-structure optical device
	Study on the fabrication of orange micro-LED arrays for display (EI CONFERENCE) 会议论文 OAI收割 ICO20: Display Devices and Systems, August 21, 2005 - August 26, 2005, Changchun, China 作者: Li J.; Wang W.; Wang W.; Zhao L.; Li J. 收藏 \| 浏览/下载：32/0 \| 提交时间：2013/03/25 Arrays of micro-sized LEDs which can be used as microdisplays have been demonstrated in recent years. In order to reduce the input and output connections to the arrays we employ a matrix addressable architecture in which all the pixels in each row are connected by a common metal line on the top of the window layer (top electrode) or at the base of substrate(bottom electrode). Decreasing the size of electrodes makes for minimizing the size of device. The optic and electric isolation and good ohmic contact are also helpful to obtain superior optical and electrical performance. We describe a procedure of fabrication of AlGalnP-based orange micro-LED by wet etching. The structure of devices is etched using both isotropic and anisotropic etchant. The pixel size is about 16um 20um and there are 1000 818 pixels in the light emitting chip whose diagonal is 1-in.