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	Automatic spin coater for concave spherical substrate (EI CONFERENCE) 会议论文 OAI收割 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, July 8, 2007 - July 12, 2007, Chengdu, China Fengchao L.; Jingsong G.; Xiaoguo F.; Jingli Z.; Zhijun X.; Jun H.; Fenglin X.; Huiqing W.; Xiaohan L. 收藏 \| 浏览/下载：24/0 \| 提交时间：2013/03/25 Coating photoresist film with uniform thickness on concave spherical substrate (CSS) is very important for microfabrication of concave spherical optical elements by lithography technique via a laser direct writer for the uneven photoresist film will result in ununiformity of line width so as to influence the characters of optical elements. For improving the uniformity of photoresist film coating on CSS an automatic spin coater was designed. The process and the mathematical model of spin coating for CSS were analyzed. Difficulties for realizing the spin coater consist of the control of multi-axis motion precisely and collaboratively valves on/ff properly and real-timely. A flexible and well-behaved spinning motion system was achieved by tmeans of principal and subordinate CPUs control. The motion program for spin coating could be created and implemented automatically while the pressure and the valves were was watched and controlled in real time. Film coating and laser direct writing experiments on a CSS with aperture equals to 100 mm and radius equals to 370 mm were performed. Photoresist film with uniform thickness on CSS was obtained by selecting proper spin coating parameters such as rotational speed acceleration and viscosity of the photoresist. After development the section analysis by the atomic force microscope showed that photoresist film thickness was about 517 nm in the center and about 520 nm in the edge of substrate the film thickness error was within 1% and the line width was about 6.0 m with steep sides parallel each other. Experimental results indicate that uniform thickness of thin photoresist film has been coated on CSS by the spin coater which contributes to quality improvement of laser direct writing lines on CSS.
	Performance Test and Flow Measurement of Contra-Rotating Axial Flow Pump 期刊论文 OAI收割 JOURNAL OF THERMAL SCIENCE, 2007, 卷号: 16, 期号: 1, 页码: 7,13 Akinori Furukawa; Toru Shigemitsu; Satoshi Watanabe 收藏 \| 浏览/下载：28/0 \| 提交时间：2013/01/31 axial flow pump contra-rotating rotors multiphase flow rotational speed control blade rows interaction
	Position following control system for the dome based on TMS320F2812 (EI CONFERENCE) 会议论文 OAI收割 ICMIT 2005: Control Systems and Robotics, September 20, 2005 - September 23, 2005, Chongging, China 作者: Zhao J. 收藏 \| 浏览/下载：17/0 \| 提交时间：2013/03/25 A position following control system was discussed to synchronize the rotational position of the dome with that of the theodolite. There were two loops in the servo control system. Open loop control was for speed adjustment while closed loop control was for position following control. The core controller of the servo control system adopted TMS320F2812 DSP (Digital Signal Processing) chip and an absolute type encoder was used as a position feedback unit. A converter DA8562 converted the digital angular position calculated in DSP to an analogy voltage to control the dome rotation through a series of devices such as frequency conversion actiyator servomotor and gear case. The experimental results show that the system synchronous following error less than 2 at 0.1/s to 35/s.