中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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Semi-analytical solutions of kinked edge cracks 期刊论文  OAI收割
ENGINEERING FRACTURE MECHANICS, 2024, 卷号: 309, 页码: 110392
作者:  
Si YJ(斯杨剑);  Wei YJ(魏宇杰)
  |  收藏  |  浏览/下载:3/0  |  提交时间:2024/12/02
The Raman band shift of suspended graphene impacted by the substrate edge and helium ion irradiation 期刊论文  OAI收割
Nano Express, 2021, 卷号: 2, 期号: 1
作者:  
Xie,Wanyi;  He,Shixuan;  Fang,Shaoxi;  Zhou,Daming;  Zhang,Yongna
  |  收藏  |  浏览/下载:28/0  |  提交时间:2021/02/24
Living in small spaces: Forest fragment characterization and its use by Philippine tarsiers (Tarsius syrichta Linnaeus, 1758) in Mindanao Island, Philippines 期刊论文  OAI收割
PRIMATES, 2020, 期号: x, 页码: -
作者:  
Bejar, Simeon Gabriel F.;  Duya, Mariano Roy M.;  Duya, Melizar, V;  Galindon, John Michael M.;  Pasion, Bonifacio O.
  |  收藏  |  浏览/下载:40/0  |  提交时间:2020/03/24
Automatic spin coater for concave spherical substrate (EI CONFERENCE) 会议论文  OAI收割
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, July 8, 2007 - July 12, 2007, Chengdu, China
Fengchao L.; Jingsong G.; Xiaoguo F.; Jingli Z.; Zhijun X.; Jun H.; Fenglin X.; Huiqing W.; Xiaohan L.
收藏  |  浏览/下载:22/0  |  提交时间:2013/03/25
Coating photoresist film with uniform thickness on concave spherical substrate (CSS) is very important for microfabrication of concave spherical optical elements by lithography technique via a laser direct writer  for the uneven photoresist film will result in ununiformity of line width so as to influence the characters of optical elements. For improving the uniformity of photoresist film coating on CSS  an automatic spin coater was designed. The process and the mathematical model of spin coating for CSS were analyzed. Difficulties for realizing the spin coater consist of the control of multi-axis motion precisely and collaboratively  valves on/ff properly and real-timely. A flexible and well-behaved spinning motion system was achieved by tmeans of principal and subordinate CPUs control. The motion program for spin coating could be created and implemented automatically while the pressure and the valves were was watched and controlled in real time. Film coating and laser direct writing experiments on a CSS with aperture equals to 100 mm and radius equals to 370 mm were performed. Photoresist film with uniform thickness on CSS was obtained by selecting proper spin coating parameters such as rotational speed  acceleration and viscosity of the photoresist. After development  the section analysis by the atomic force microscope showed that photoresist film thickness was about 517 nm in the center and about 520 nm in the edge of substrate  the film thickness error was within 1%  and the line width was about 6.0 m with steep sides parallel each other. Experimental results indicate that uniform thickness of thin photoresist film has been coated on CSS by the spin coater  which contributes to quality improvement of laser direct writing lines on CSS.