中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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Structure design of a high-performance aluminum nitride differential resonant accelerometer 期刊论文  OAI收割
Proceedings of SPIE - The International Society for Optical Engineering, 2017, 卷号: 10605, 页码: 1060519
作者:  
Lei, Qiang;  Gao Y(高扬)
  |  收藏  |  浏览/下载:22/0  |  提交时间:2019/08/29
Structure design of a high-performance aluminum nitride differential resonant accelerometer 期刊论文  OAI收割
Proceedings of SPIE - The International Society for Optical Engineering, 2017, 卷号: 10605, 页码: 1060519
作者:  
Lei, Qiang;  Gao Y(高扬);  Gao, Yang;  Zhang, Da-Peng
  |  收藏  |  浏览/下载:20/0  |  提交时间:2019/08/27
The packaging technology of optical switch arrays (EI CONFERENCE) 会议论文  OAI收割
ICO20: MEMS, MOEMS, and NEMS, August 21, 2005 - August 26, 2005, Changchun, China
作者:  
Chen W.;  Wang W.;  Zhao L.;  Wang W.;  Wang L.
收藏  |  浏览/下载:22/0  |  提交时间:2013/03/25