中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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  • 2008 [3]
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  • 半导体材料 [3]
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Growth and fabrication of AlGaN/GaN HEMT based on Si(111) substrates by MOCVD 期刊论文  OAI收割
microelectronics journal, 2008, 卷号: 39, 期号: 9, 页码: 1108-1111
Luo, WJ; Wang, XL; Xiao, HL; Wang, CM; Ran, JX; Guo, LC; Li, JP; Liu, HX; Chen, YL; Yang, FH; Li, JM
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The effects of substrate temperature on the structure and properties of ZnO films prepared by pulsed laser deposition 期刊论文  OAI收割
vacuum, 2008, 卷号: 82, 期号: 5, 页码: 495-500
Zhu, BL; Sun, XH; Zha, XZ; Su, FH; Li, GH; Wu, XG; Wu, J; Wu, R; Liu, J
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Fracture Properties of LPCVD Silicon Nitride and Thermally Grown Silicon Oxide Thin Films From the Load-Deflection of Long Si3N4 and SiO2/Si3N4 Diaphragms 期刊论文  OAI收割
journal of microelectromechanical systems, 2008, 卷号: 17, 期号: 5, 页码: 1120-1134
Yang, JL; Gaspar, J; Paul, O
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