中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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  • 会议论文 [2]
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  • 2011 [2]
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Neural Network Predictive R2R Control to CMP Process 会议论文  OAI收割
2011 4th IEEE International Conference on Computer Science and Information Technology, Chengdu, China, June 10-12, 2011
作者:  
Wang L(王亮);  Hu JT(胡静涛)
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Fuzzy predictive R2R control to CMP process 会议论文  OAI收割
2011 IEEE International Conference on Computer Science and Automation Engineering, CSAE 2011, Shanghai, China, June 10-12, 2011
作者:  
Wang L(王亮);  Hu JT(胡静涛)
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