机构

• 光电技术研究所 [3]

采集方式

• OAI收割 [3]

内容类型

• 会议论文 [3]

发表日期

• 2012 [3]

学科主题

筛选

浏览/检索结果: 共3条，第1-3条 帮助 限定条件 内容类型：会议论文    发表日期：2012     条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Research on method of measuring pattern distortion of circularly symmetrical phase etched CGHs and eliminating the effect of pattern distortion 会议论文  OAI收割 Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 2012 作者:  Deng, Chao;  Feng, Jie;  Xing, Tingwen 收藏  |   Maskless lithography alignment method based on phase-shifting Moiré fringes technique 会议论文  OAI收割 Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 2012 作者:  Zhu, Jiangping;  Hu, Song;  Yu, Junsheng;  Tang, Yan 收藏  |   Effects of grating marks parameters on lithography alignment precision 会议论文  OAI收割 Proceedings of SPIE: Nanophotonics and Micro/Nano Optics, 2012 作者:  Zhu, Jiangping;  Hu, Song;  Yu, Junsheng 收藏  |