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长春光学精密机械与... [14]
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专题:长春光学精密机械与物理研究所
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Optical and electrical properties of p-type ZnO thin film post-treated by plasma-enhanced chemical vapor deposition
会议论文
OAI收割
2014 International Conference on Mechatronics and Intelligent Materials, MIM 2014, May 18, 2014 - May 19, 2014, Lijiang, China
Cao P.
;
Bai Y.
;
Qu Z.
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浏览/下载:14/0
  |  
提交时间:2015/04/27
Structural properties of p-type ZnO thin film post-treated by NH3 plasma method
会议论文
OAI收割
4th International Conference on Advanced Engineering Materials and Technology, AEMT 2014, June 14, 2014 - June 15, 2014, Xiamen, China
Cao P.
;
Bai Y.
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  |  
浏览/下载:36/0
  |  
提交时间:2015/04/27
Response spectrum 0.9-2.65 m of In0.82Ga0.18As detectors by two-step growth technique
会议论文
OAI收割
2012 International Conference on Material Sciences and Manufacturing Technology, ICMSMT 2012, October 5, 2012 - October 6, 2012, Dalian, China
作者:
Zhang T.
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浏览/下载:36/0
  |  
提交时间:2014/05/15
Response spectrum 0.9-2.65 m of In0.82Ga0.18As detectors by two-step growth technique (EI CONFERENCE)
会议论文
OAI收割
2012 International Conference on Material Sciences and Manufacturing Technology, ICMSMT 2012, October 5, 2012 - October 6, 2012, Dalian, China
作者:
Zhang T.
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  |  
浏览/下载:20/0
  |  
提交时间:2013/03/25
InP/In0.82Ga0.18As/InP heterostructure used for infrared detector were grown on (100) S-doped InP substrates using two-step growth technique by low temperature metal-organic chemical vapor deposition. The growth was performed using TMIn
TMGa
AsH3
and PH3 as growth precursors in a horizontal reactor. The substrates on a graphite susceptor were heated by inductively coupling RF power
their temperatures were detected by a thermocouple
and the reactor pressure was kept at 10000 Pa. The growth structure of detector included In0.82Ga0.18As buffer with the thickness of 100 nm
In0.82Ga0.18As absorption layer with the thickness of 2.8 m
and the InP cap with the thickness of 0.8 m. The planar type of p-i-n detector was fabricated by Zn diffusion. The properties of In0.82Ga0.18As detector were studied
the curves of the I-V characteristics
the range of response spectrum
and the detectivity (D*) were obtained. (2013) Trans Tech Publications
Switzerland.
Effect of substrate orientation and PH3 thermal annealing treatment on catalyst-free InP nanowires
会议论文
OAI收割
2013 2nd International Conference on Materials Science and Technology, ICMST 2013, April 11, 2013 - April 12, 2013, Hong Kong, China
Miao G. Q.
;
Zhang Z. W.
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浏览/下载:10/0
  |  
提交时间:2014/05/15
ZnO films growth at different temperature on the substrate of Corning glass by MOCVD (EI CONFERENCE)
会议论文
OAI收割
2009 International Symposium on Liquid Crystal Science and Technology, August 2, 2009 - August 5, 2009, Kunming, China
作者:
Zhao J.
;
Gao X.
;
Wang C.
;
Tang W.
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  |  
浏览/下载:17/0
  |  
提交时间:2013/03/25
We deposited ZnO films on Corning glass substrate by metal-organic chemical vapor deposition (MOCVD). We found the diffraction (002) peak at ~34.46
indicating that the ZnO thin films were C-oriented. ZnO films were highly transparent with a transmission ratio larger than 85% in the visible range. The surface morphology of the films was observed by atomic force microscopy (AFM). (2010) Trans Tech Publications.
Growth of ZnO films under different oxygen partial pressures by metal organic chemical vapour deposition (EI CONFERENCE)
会议论文
OAI收割
2009 International Symposium on Liquid Crystal Science and Technology, August 2, 2009 - August 5, 2009, Kunming, China
作者:
Gao X.
;
Zhao J.
;
Tang W.
;
Wang C.
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  |  
浏览/下载:19/0
  |  
提交时间:2013/03/25
ZnO films were grown under different oxygen partial pressures by metal organic chemical vapor deposition on the substrates of Corning glass. We investigated the quality of the films by SIEMENS D8 X-ray diffractometer. The surface morphology of the films were observed by Digital Nanoscope IIIa AFM with normal silicon nitride tip in the contact mode. The hall effect measurements were carried out with indium ohmic contact. The transmission spectrum of the films were measured. The transmission ratio is larger than 80% in the region above the wavelength of 385nm
and sharply decreased under 10% below the wavelength of 375 nm. (2010) Trans Tech Publications.
ZnO thin film grown on glass by metal-organic chemical vapor deposition
会议论文
OAI收割
2008
作者:
Wang C.
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  |  
浏览/下载:8/0
  |  
提交时间:2013/03/28
ZnO thin film grown on glass by metal-organic chemical vapor deposition (EI CONFERENCE)
会议论文
OAI收割
2008 2nd IEEE International Nanoelectronics Conference, INEC 2008, March 24, 2008 - March 27, 2008, Shanghai, China
作者:
Wang C.
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  |  
浏览/下载:44/0
  |  
提交时间:2013/03/25
ZnO thin film was deposited on the substrate of Corning glass by metal-organic chemical vapor deposition (MOCVD)[1
2
3] with a buffer layer of SiNx grown by plasma enhanced chemical vapor deposition. The quality of ZnO film was studied by X-ray diffraction and photoluminescence measurement. We found strong diffraction (0 0 2) peak at 34.50
indicating that the ZnO film was strongly C-oriented. The full-width at half maximum of (0 0 2) peak was 0.179. 2008 IEEE.
The fabrication and study of ZnO-based thin film transistors (EI CONFERENCE)
会议论文
OAI收割
Asia Display 2007, AD'07, March 12, 2007 - March 16, 2007, Shanghai, China
作者:
Wang C.
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  |  
浏览/下载:13/0
  |  
提交时间:2013/03/25
Bottom-gate-type thin film transistors using ZnO as an active channel layer (ZnO-TF-TS) have been constructed. The ZnO layers were deposited using metal organic chemical vapor deposition (MOCVD)[1-3] at about 360C. SiO2 was used as the material of gate insulator to suppress the leakage current effectively and to enable the ZnO-TFT to operate successfully. The drain current on-to-off ratio of ZnO-TFTs fabricated on the substrate of glass is about 104. The average optical transmission of ZnO-TFTs in the visible portion is 80%. All above shows that it is possible to fabricate a transparent TFT using ZnO as an active channel layer instead of the traditional Si material.