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Maskless lithography alignment method based on phase-shifting Moiré fringes technique 会议论文  OAI收割
Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 2012
作者:  
Zhu, Jiangping;  Hu, Song;  Yu, Junsheng;  Tang, Yan
收藏  |  浏览/下载:12/0  |  提交时间:2016/11/24
Compensation of moire fringe sinusoidal deviation in photoelectrical encoder based on tunable filter (EI CONFERENCE) 会议论文  OAI收割
2011 Symposium on Photonics and Optoelectronics, SOPO 2011, May 16, 2011 - May 18, 2011, Wuhan, China
作者:  
Wang Y.;  Wang Y.;  Wang Y.;  Wang Y.;  Wang Y.
收藏  |  浏览/下载:20/0  |  提交时间:2013/03/25
In order to improve the precision of the absolute photoelectrical encoder  a compensating method is put forward  which restrains the harmonics in moire fringe signal. After analyzing the relationship between the subdividing error and the sinusoidal index  a low-pass digital filter which can make the moire signal satisfy the need of 1024 subdivision is designed. Considering with the fundamental frequency varies with the rotating speed of encoder  the tunable filter is adopted  whose cutoff frequency is calculated according to the coarse information of the encoder. The simulating results show that the proposed method can improve the sinusoidal index  especially at high rotating speed. At last  the compensating algorithm is implemented in the terminal of satellite optical communication  which needs high resolution. The experimental results show indicate that the developed method is feasible. 2011 IEEE.  
Theoretical research of aspheric testing by using the digital moire patterns base on the sub-region splicing method 会议论文  OAI收割
2011
Man Y. C.; Zhang X. J.
收藏  |  浏览/下载:7/0  |  提交时间:2013/03/28