机构

• 长春光学精密机械与物... [6]

采集方式

• OAI收割 [6]

内容类型

• 会议论文 [6]

发表日期

• 2006 [1]
• 2004 [5]

学科主题

筛选

浏览/检索结果: 共6条，第1-6条 帮助 限定条件 内容类型：会议论文    专题：长春光学精密机械与物理研究所    第一署名单位    第一作者单位    通讯作者单位     条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择提交时间升序提交时间降序发表日期升序发表日期降序题名升序题名降序作者升序作者降序 The packaging technology of optical switch arrays (EI CONFERENCE) 会议论文  OAI收割 ICO20: MEMS, MOEMS, and NEMS, August 21, 2005 - August 26, 2005, Changchun, China 作者:  Chen W.;  Wang W.;  Zhao L.;  Wang W.;  Wang L. 收藏  |  浏览/下载：13/0  |  提交时间：2013/03/25 Optical switch is one of key supporting technologies in all-optical-network (AON). And electrostatic MOEMS (Micro-Optical-Electro-Mechanical Systems) switch plays a very important role in all the researched switches  because of their excellent features  including low insertion  low crosstalk and scalability. But the packaging technology has been limiting the development of optical switch. In this paper  the authors study the laser beam propagating during the free space and select collimator  design the pedestal to packaging and address aspects of the insertion loss that are most important loss mechanisms for the 2D cross-connect switch.   The masks fabricated by UV LIGA for excimer laser ablation and X-ray lithography 会议论文  OAI收割 2004 Liang J. Q.; Le Z. C.; Wang W. B.; Peng L. Q.; Lan W. H.; Ming A. J.; Ye J.; Quan B. S.; Yao J. S.; Xuan M.; Wang L. J. 收藏  |  浏览/下载：9/0  |  提交时间：2013/03/28 The study on the compound X-ray refractive lens using LIGA technique (EI CONFERENCE) 会议论文  OAI收割 MEMS/MOEMS Technologies and Applications II, November 10, 2004 - November 12, 2004, Beijing, China 作者:  Wang L.;  Wang L.;  Wang L.;  Wang W.;  Wang W. 收藏  |  浏览/下载：14/0  |  提交时间：2013/03/25 A theoretical method of focusing X-rays by the compound X-ray refractive lens is presented in this paper. The authors report their resent theoretical results including the material selection and structure parameters for such a device. As an example  a compound X-ray refractive lens with PMMA material is designed. The detailed fabrication process of the PMMA compound lens by LIGA technology is described. Moreover  some measured results by means of SEM are also shown. The structure height of one of the PMMA compound lens is measured to be 500m.   The study on the compound X-ray refractive lens using LIGA technique 会议论文  OAI收割 2004 Liang J. Q.; Le Z. C.; Peng L. Q.; Wang W. B.; Lan W. H.; Ming A. J.; Yi F. T.; Ye J.; Quan B. S.; Yao J. S.; Xuan M.; Wang L. J. 收藏  |  浏览/下载：11/0  |  提交时间：2013/03/28 Study on optical parts of MOEMS optical switch with low insertion loss 会议论文  OAI收割 2004 Ming A. J.; Liang J. Q.; Lan W. H.; Dong W.; Yao J. S.; Wang W. B.; Le Z. C.; Chen W. Y.; Wang L. J. 收藏  |  浏览/下载：9/0  |  提交时间：2013/03/28 Study on optical parts of MOEMS optical switch with low insertion loss (EI CONFERENCE) 会议论文  OAI收割 MEMS/MOEMS Technologies and Applications II, November 10, 2004 - November 12, 2004, Beijing, China 作者:  Wang W.;  Wang L.;  Wang L.;  Wang L.;  Chen W. 收藏  |  浏览/下载：22/0  |  提交时间：2013/03/25 We study insertion losses of optical switch when the laser beam is propagating during the free space between two single mode fibers (SMFs) and the related assemblage challenges  Then a new packaging structure is developed for the hybrid-integration of free-space MOEMS (micro-opto-electro-mechanical systems) chip with a silicon micromachined submount to improve alignment accuracy. The submount is designed to accommodate various free-space MOEMS chips with minimal active optical alignment  thus reducing the packaging cost. The silicon submount has a central recess to place the MOEMS chip in  sixteen V-grooves for optical fibers  and micropits for micro ball lenses  all bulk micromachined at the same time by a single anisotropic wet etching step. A corner compensation technique is employed to prevent erosion of the convex corners  where different geometries meet. Through this assembling method  the fiber  micro ball lens can be aligned preciously thus reduced lateral and angular misalignment between them. Then total insertion losses can be decreased.