中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
机构
采集方式
内容类型
发表日期
学科主题
  • 微电子学 [5]
筛选

浏览/检索结果: 共5条,第1-5条 帮助

限定条件    
条数/页: 排序方式:
Influence of nitrogen dose on the charge density of nitrogen-implanted buried oxide in SOI wafers 期刊论文  OAI收割
journal of semiconductors, 2010, 卷号: 31, 期号: 2, 页码: 99-102
Zheng Zhongshan; Liu Zhongli; Li Ning; Li Guohua; Zhang Enxia
收藏  |  浏览/下载:17/0  |  提交时间:2011/08/16
Influence of nitrogen implantation into the buried oxide on the radiation hardness of silicon-on-insulator wafers 期刊论文  OAI收割
chinese physics b, 2010, 卷号: 19, 期号: 10, 页码: art. no. 106106
Tang HM (Tang Hai-Ma); Zheng ZS (Zheng Zhong-Shan); Zhang EX (Zhang En-Xia); Yu F (Yu Fang); Li N (Li Ning); Wang NJ (Wang Ning-Juan)
收藏  |  浏览/下载:48/0  |  提交时间:2010/11/02
Effect of implantation of nitrogen into SIMOX buried oxide on its fixed positive charge density 期刊论文  OAI收割
acta physica sinica, 2007, 卷号: 56, 期号: 9, 页码: 5446-5451
Zheng, ZS (Zheng Zhong-Shan); Zhang, EX (Zhang En-Xia); Liu, ZL (Liu Zhong-Li); Zhang, ZX (Zhang Zheng-Xuan); Li, N (Li Ning); Li, GH (Li Guo-Hua)
收藏  |  浏览/下载:34/0  |  提交时间:2010/03/29
SIMOX  
Radiation hardness characteristic of N-implanted and F-implanted SIMOX/NMOSFET 期刊论文  OAI收割
功能材料与器件学报, 2007, 卷号: 13, 期号: 5, 页码: 426-430
作者:  
YU Fang
收藏  |  浏览/下载:11/0  |  提交时间:2010/11/23
Sensitivity of Total-Dose Radiation Hardness of SIMOX Buried Oxides to Doses of Nitrogen Implantation into Buried Oxides 期刊论文  OAI收割
半导体学报, 2005, 卷号: 26, 期号: 5, 页码: 862-866
Zheng Zhongshan; Liu Zhongli; Zhang Guoqiang; Li Ning; Li Guohua; Ma Hongzhi; Zhang Enxia; Zhang Zhengxuan; Wang Xi
收藏  |  浏览/下载:16/0  |  提交时间:2010/11/23