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CAS IR Grid
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长春光学精密机械与物... [1]
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OAI收割 [1]
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会议论文 [1]
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2009 [1]
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专题:长春光学精密机械与物理研究所
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1D-KBA microscope using double-periodic multilayer (EI CONFERENCE)
会议论文
OAI收割
Advances in X-Ray/EUV Optics and Components IV, August 3, 2009 - August 5, 2009, San Diego, CA, United states
作者:
Wang Z.
;
Wang X.
;
Wang X.
;
Wang X.
;
Wang Z.
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提交时间:2013/03/25
To study the action of shock wave in CH target
one-dimensional grazing incidence KBA microscope for 4.75keV energy was set up. Because of strong absorption in air
4.75keV energy microscope can just work in vacuum. Accordingly
the alignment and assemblage will be very complicated and difficult. A special multilayer method
using double periodic multilayer
was proposed to solve this problem. This multilayer has high reflectivity not only for 4.75keV X-rays but also for 8keV X-rays at the same grazing incidence angle. It means 1D-KBA microscope has the same light trace for different working energies. Therefore
we can implement the alignment and assembly of 4.75keV system by the help of 8keV X-rays. Because 8keV X-rays is very easy produced by X-ray tube and has strong transmittability in air
the alignment and assemblage process became relatively easy. By now
we have finished the alignment experiment at 8keV and obtained imaging results. The performance is about 2-3m resolution in 250m field of view. It is coincide with the calculation. 2009 SPIE.