Asymmetric Trajectory Planning for Vacuum Robot Motion
文献类型：会议论文
| 作者 | Zou FS(邹风山); Qu DK(曲道奎); Wang JT(王金涛); Xu F(徐方) |
| 出版日期 | 2011 |
| 会议名称 | 2011 IEEE International Conference on Robotics and Automation |
| 会议日期 | May 9-13, 2011 |
| 会议地点 | Shanghai, China |
| 关键词 | vacuum robot asymmetric profile trajectory planning |
| 页码 | 4 pp. |
| 中文摘要 | In order to obtain high-precision and high-speed motion and reduce the residual vibration for vacuum robot, an asymmetric trajectory planning method with jerk bounded is presented. In this paper we discuss all possible profile shapes for the asymmetric trajectory planning. And then the algorithm and its implementation are proposed with a direct and complete method. At the end, we apply the proposed approach to high-precision vacuum cluster tool robot which is used in the vacuum chambers for handling semiconductor wafer. Experimental results are presented to verify the effectiveness and reliability of the proposed approach. |
| 收录类别 | EI ; CPCI（ISTP） |
| 产权排序 | 1 |
| 会议主办者 | IEEE Robotics Autom. Soc. |
| 会议录 | 2011 IEEE International Conference on Robotics and Automation
 |
| 会议录出版者 | IEEE |
| 会议录出版地 | Piscataway, NJ, USA |
| 语种 | 英语 |
| ISSN号 | 1050-4729 |
| ISBN号 | 978-1-61284-386-5 |
| WOS记录号 | WOS:000324383405112 |
| 源URL | [http://ir.sia.cn/handle/173321/7661]  |
| 专题 | 沈阳自动化研究所_其他 |
| 推荐引用方式 GB/T 7714 | Zou FS,Qu DK,Wang JT,et al. Asymmetric Trajectory Planning for Vacuum Robot Motion[C]. 见:2011 IEEE International Conference on Robotics and Automation. Shanghai, China. May 9-13, 2011. |
入库方式： OAI收割
来源：沈阳自动化研究所
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