Atomic force microscopy-based repeated machining theory for nanochannels on silicon oxide surfaces
文献类型：期刊论文
| 作者 | Wang ZQ(王志迁); Jiao ND(焦念东) ; Tung, S.; Dong ZL(董再励)
|
| 刊名 | APPLIED SURFACE SCIENCE
 |
| 出版日期 | 2011 |
| 卷号 | 257期号:8页码:3627-3631 |
| 关键词 | Atomic force microscopy Nanochannels Nanoelectromechanical systems Nanolithography Nanotribology |
| ISSN号 | 0169-4332 |
| 产权排序 | 1 |
| 中文摘要 | The atomic force microscopy (AFM)-based repeated nanomachining of nanochannels on silicon oxide surfaces is investigated both theoretically and experimentally. The relationships of the initial nanochannel depth vs. final nanochannel depth at a normal force are systematically studied. Using the derived theory and simulation results, the final nanochannel depth can be predicted easily. Meanwhile, if a nanochannel with an expected depth needs to be machined, a right normal force can be selected simply and easily in order to decrease the wear of the AFM tip. The theoretical analysis and simulation results can be effectively used for AFM-based fabrication of nanochannels. |
| WOS标题词 | Science & Technology ; Physical Sciences ; Technology |
| 类目[WOS] | Chemistry, Physical ; Materials Science, Coatings & Films ; Physics, Applied ; Physics, Condensed Matter |
| 研究领域[WOS] | Chemistry ; Materials Science ; Physics |
| 关键词[WOS] | NANOFLUIDIC CHANNELS ; FABRICATION ; NANOLITHOGRAPHY ; LITHOGRAPHY |
| 收录类别 | SCI ; EI |
| 资助信息 | This work was supported by the National High Technology Research and Development Program of China (Grant Nos. 2009AA04Z313, 2009AA03Z316), and the CAS/SAFEA International Partnership Program for Creative Research Teams. |
| 语种 | 英语 |
| WOS记录号 | WOS:000286179800081 |
| 公开日期 | 2012-05-29 |
| 源URL | [http://ir.sia.cn/handle/173321/7317]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 推荐引用方式 GB/T 7714 | Wang ZQ,Jiao ND,Tung, S.,et al. Atomic force microscopy-based repeated machining theory for nanochannels on silicon oxide surfaces[J]. APPLIED SURFACE SCIENCE,2011,257(8):3627-3631. |
| APA | Wang ZQ,Jiao ND,Tung, S.,&Dong ZL.(2011).Atomic force microscopy-based repeated machining theory for nanochannels on silicon oxide surfaces.APPLIED SURFACE SCIENCE,257(8),3627-3631. |
| MLA | Wang ZQ,et al."Atomic force microscopy-based repeated machining theory for nanochannels on silicon oxide surfaces".APPLIED SURFACE SCIENCE 257.8(2011):3627-3631. |
入库方式： OAI收割
来源：沈阳自动化研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。