Nanochannel system fabricated by MEMS microfabrication and atomic force microscopy
文献类型：期刊论文
| 作者 | Wang ZQ(王志迁); Wang D(王栋) ; Jiao ND(焦念东); Tung, S.; Dong ZL(董再励)
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| 刊名 | IET NANOBIOTECHNOLOGY
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| 出版日期 | 2011 |
| 卷号 | 5期号:4页码:108-113 |
| 关键词 | NANOFLUIDIC CHANNELS NANOLITHOGRAPHY SILICON LITHOGRAPHY SURFACES |
| ISSN号 | 1751-8741 |
| 产权排序 | 1 |
| 中文摘要 | A silicon nanochannel system with integrated transverse electrodes was designed and fabricated by combining micro-electro-mechanical systems (MEMS) micromachining and atomic force microscopy (AFM)-based nanolithography. The fabrication process began with the patterning of microscale reservoirs and electrodes on an oxidised silicon chip using conventional MEMS techniques. A nanochannel, approximately 30 mu m long with a small semi-circular cross-sectional area of 20 nm x 200 nm, was then mechanically machined on the oxide surface between the micro reservoirs by applying AFM nanolithography with an all-diamond probe. Anodic bonding was used to seal off the nanochannel with a matching Pyrex cover. Continuous flow in the nanochannel was verified by pressurising a solution of fluorescein isothiocyanate in ethanol through the nanochannel in a vacuum chamber. It was further demonstrated by translocating negatively charged nanobeads (diameter similar to 20 nm) through the nanochannel by using an external DC electric field. The passage of the nanobeads caused a sharp increase in the transverse electrical conductivity of the nanochannel. |
| WOS标题词 | Science & Technology ; Life Sciences & Biomedicine |
| 类目[WOS] | Biochemical Research Methods ; Nanoscience & Nanotechnology |
| 研究领域[WOS] | Biochemistry & Molecular Biology ; Science & Technology - Other Topics |
| 关键词[WOS] | NANOFLUIDIC CHANNELS ; NANOLITHOGRAPHY ; SILICON ; LITHOGRAPHY ; SURFACES |
| 收录类别 | SCI ; EI |
| 资助信息 | The present work was supported by the National High Technology Research and Development Program of China (Grant nos 2009AA04Z313 and 2009AA03Z316), National Natural Science Foundation of China (Grant no. 61106109) and the CAS/SAFEA International Partnership Program for Creative Research Teams. |
| 语种 | 英语 |
| WOS记录号 | WOS:000298136700002 |
| 公开日期 | 2012-05-29 |
| 源URL | [http://ir.sia.cn/handle/173321/7380]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 推荐引用方式 GB/T 7714 | Wang ZQ,Wang D,Jiao ND,et al. Nanochannel system fabricated by MEMS microfabrication and atomic force microscopy[J]. IET NANOBIOTECHNOLOGY,2011,5(4):108-113. |
| APA | Wang ZQ,Wang D,Jiao ND,Tung, S.,&Dong ZL.(2011).Nanochannel system fabricated by MEMS microfabrication and atomic force microscopy.IET NANOBIOTECHNOLOGY,5(4),108-113. |
| MLA | Wang ZQ,et al."Nanochannel system fabricated by MEMS microfabrication and atomic force microscopy".IET NANOBIOTECHNOLOGY 5.4(2011):108-113. |
入库方式： OAI收割
来源：沈阳自动化研究所
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