Research on the atomic force microscopy-based fabrication of nanochannels on silicon oxide surfaces
文献类型：期刊论文
| 作者 | Wang ZQ(王志迁); Jiao ND(焦念东) ; TUNG Steve; Dong ZL(董再励)
|
| 刊名 | Chinese Science Bulletin
 |
| 出版日期 | 2010 |
| 卷号 | 55期号:30页码:3466–3471 |
| 关键词 | atomic force microscopy nanochannels nanoelectromechanical systems nanolithography nanotribology |
| ISSN号 | 1001-6538 |
| 产权排序 | 1 |
| 中文摘要 | The atomic force microscopy (AFM)-based nanomachining of nanochannels on silicon oxide surfaces is investigated both theoretically and experimentally. The relationships of nanochannel depth versus cutting velocity, nanochannel depth versus normal force, friction force versus cutting velocity, and friction force versus normal force are systematically studied. Using the derived theory and fabrication method, a nanochannel with an expected depth can be machined simply by controlling the vertical deflection signal on the position sensitive detector of AFM. The theoretical analysis and fabrication method can be effectively used for AFM-based fabrication of nanochannels. |
| WOS标题词 | Science & Technology |
| 类目[WOS] | Multidisciplinary Sciences |
| 研究领域[WOS] | Science & Technology - Other Topics |
| 关键词[WOS] | NANOFLUIDIC CHANNELS ; MICROFLUIDIC DEVICE ; CELLS ; AFM ; NANOMANIPULATION ; SYSTEMS ; MANIPULATION ; FLOW |
| 收录类别 | SCI |
| 语种 | 英语 |
| WOS记录号 | WOS:000284064700012 |
| 公开日期 | 2012-05-29 |
| 源URL | [http://ir.sia.cn/handle/173321/7399]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 推荐引用方式 GB/T 7714 | Wang ZQ,Jiao ND,TUNG Steve,et al. Research on the atomic force microscopy-based fabrication of nanochannels on silicon oxide surfaces[J]. Chinese Science Bulletin,2010,55(30):3466–3471. |
| APA | Wang ZQ,Jiao ND,TUNG Steve,&Dong ZL.(2010).Research on the atomic force microscopy-based fabrication of nanochannels on silicon oxide surfaces.Chinese Science Bulletin,55(30),3466–3471. |
| MLA | Wang ZQ,et al."Research on the atomic force microscopy-based fabrication of nanochannels on silicon oxide surfaces".Chinese Science Bulletin 55.30(2010):3466–3471. |
入库方式： OAI收割
来源：沈阳自动化研究所
浏览0
下载0
收藏0
其他版本
除非特别说明，本系统中所有内容都受版权保护，并保留所有权利。