A nanochannel system fabricated by MEMS microfabrication and atomic force microscopy
文献类型：会议论文
| 作者 | Wang ZQ(王志迁); Wang D(王栋) ; Jiao ND(焦念东); Tung, S.; Dong ZL(董再励)
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| 出版日期 | 2011 |
| 会议名称 | 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 |
| 会议日期 | February 20-23, 2011 |
| 会议地点 | Kaohsiung, Taiwan |
| 关键词 | Atomic force microscopy Electric fields Electrodes Ethanol MEMS Microanalysis Micromachining Nanofluidics Nanolithography Silicon oxides |
| 页码 | 372-376 |
| 中文摘要 | A silicon nanochannel system with integrated transverse electrodes was designed and fabricated by combining MEMS microfabrication and AFM nanolithography. The fabrication process began with the patterning of microscale reservoirs and electrodes on an oxidized silicon chip using conventional MEMS techniques. A nanochannel, approximately 30m long with a small semi-circular cross-sectional area of 20nm by 200nm, was then mechanically machined on the oxide surface between the micro reservoirs by applying AFM nanolithography with an all-diamond probe. Anodic bonding was used to seal off the nanochannel with a matching Pyrex cover. Continuous flow in the nanochannel was verified by pressurizing a solution of fluorescein isothiocyanate (FITC) in ethanol through the channel in a vacuum chamber. It was further demonstrated by driving carboxyl-modified FluoSpheres® (diameter ∼20 nm) through the nanochannel with an external electric field. Presence of the FluoSpheres® in the channel was indicated by a sharp increase in current between the transverse electrodes. |
| 收录类别 | EI |
| 产权排序 | 1 |
| 会议主办者 | Institute of Electrical and Electronics Engineers (IEEE); IEEE Nanotechnology Council (NTC); National Cheng Kung University; National Tsing Hua University; Chinese International NEMS Socity (CINS) |
| 会议录 | NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
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| 会议录出版者 | IEEE Computer Society |
| 会议录出版地 | Piscataway, NJ |
| 语种 | 英语 |
| ISBN号 | 978-1-61284-775-7 |
| 源URL | [http://ir.sia.cn/handle/173321/8491]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 推荐引用方式 GB/T 7714 | Wang ZQ,Wang D,Jiao ND,et al. A nanochannel system fabricated by MEMS microfabrication and atomic force microscopy[C]. 见:6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011. Kaohsiung, Taiwan. February 20-23, 2011. |
入库方式： OAI收割
来源：沈阳自动化研究所
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