System errors quantitative analysis of sample-scanning AFM
文献类型:期刊论文
作者 | Tian XJ(田孝军)![]() ![]() ![]() |
刊名 | Ultramicroscopy
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出版日期 | 2005 |
卷号 | 105期号:1-4页码:336-342 |
关键词 | Sample-scanning Afm Tube Scanner Kinematics Model Scanning Size Error Vertical Cross Coupling Error |
ISSN号 | 0304-3991 |
产权排序 | 1 |
英文摘要 | During imaging or nanomanipulation with a sample-scanning AFM, two important errors, scanning size error and vertical cross coupling error, will be generated due to bend motion of the tube scanner, and these two errors are destructive to nanostructures quantitative analysis. To minimize the errors, a kinematics model of the scanner is presented, and according to the model the two errors are quantitatively analyzed, which shows that scanning size error is greatly affected by sample thickness and nominal scanning size, while vertical cross coupling error is greatly affected by probe tip offset to tube axis and nominal scanning size. Corresponding methods are proposed for minimizing the errors. Gratings imaging experiments verify the kinematics model and errors calculation formulas. |
WOS关键词 | Atomic-force Microscope ; Piezoelectric Tube Scanners ; Model |
WOS研究方向 | Microscopy |
语种 | 英语 |
WOS记录号 | WOS:000233317300048 |
公开日期 | 2012-05-29 |
源URL | [http://ir.sia.cn/handle/173321/7410] ![]() |
专题 | 沈阳自动化研究所_机器人学研究室 |
通讯作者 | Tian XJ(田孝军) |
作者单位 | 1.Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI 48824, United States 2.Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China 3.Liaoning Institute of Technology, Jinzhou 121000, China 4.Graduate School, Chinese Academy of Sciences, Beijing 100039, China |
推荐引用方式 GB/T 7714 | Tian XJ,Dong ZL,Wang YC. System errors quantitative analysis of sample-scanning AFM[J]. Ultramicroscopy,2005,105(1-4):336-342. |
APA | Tian XJ,Dong ZL,&Wang YC.(2005).System errors quantitative analysis of sample-scanning AFM.Ultramicroscopy,105(1-4),336-342. |
MLA | Tian XJ,et al."System errors quantitative analysis of sample-scanning AFM".Ultramicroscopy 105.1-4(2005):336-342. |
入库方式: OAI收割
来源:沈阳自动化研究所
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