中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
System errors quantitative analysis of sample-scanning AFM

文献类型:期刊论文

作者Tian XJ(田孝军); Dong ZL(董再励); Wang YC(王越超)
刊名Ultramicroscopy
出版日期2005
卷号105期号:1-4页码:336-342
关键词Sample-scanning Afm Tube Scanner Kinematics Model Scanning Size Error Vertical Cross Coupling Error
ISSN号0304-3991
产权排序1
英文摘要

During imaging or nanomanipulation with a sample-scanning AFM, two important errors, scanning size error and vertical cross coupling error, will be generated due to bend motion of the tube scanner, and these two errors are destructive to nanostructures quantitative analysis. To minimize the errors, a kinematics model of the scanner is presented, and according to the model the two errors are quantitatively analyzed, which shows that scanning size error is greatly affected by sample thickness and nominal scanning size, while vertical cross coupling error is greatly affected by probe tip offset to tube axis and nominal scanning size. Corresponding methods are proposed for minimizing the errors. Gratings imaging experiments verify the kinematics model and errors calculation formulas.

WOS关键词Atomic-force Microscope ; Piezoelectric Tube Scanners ; Model
WOS研究方向Microscopy
语种英语
WOS记录号WOS:000233317300048
公开日期2012-05-29
源URL[http://ir.sia.cn/handle/173321/7410]  
专题沈阳自动化研究所_机器人学研究室
通讯作者Tian XJ(田孝军)
作者单位1.Department of Electrical and Computer Engineering, Michigan State University, East Lansing, MI 48824, United States
2.Shenyang Institute of Automation, Chinese Academy of Sciences, Shenyang 110016, China
3.Liaoning Institute of Technology, Jinzhou 121000, China
4.Graduate School, Chinese Academy of Sciences, Beijing 100039, China
推荐引用方式
GB/T 7714
Tian XJ,Dong ZL,Wang YC. System errors quantitative analysis of sample-scanning AFM[J]. Ultramicroscopy,2005,105(1-4):336-342.
APA Tian XJ,Dong ZL,&Wang YC.(2005).System errors quantitative analysis of sample-scanning AFM.Ultramicroscopy,105(1-4),336-342.
MLA Tian XJ,et al."System errors quantitative analysis of sample-scanning AFM".Ultramicroscopy 105.1-4(2005):336-342.

入库方式: OAI收割

来源:沈阳自动化研究所

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