An AFM based nanomanipulation system with 3D nano forces feedback
文献类型：会议论文
| 作者 | Tian XJ(田孝军) ; Jiao ND(焦念东); Liu LQ(刘连庆); Wang YC(王越超); Dong ZL(董再励); Li WJ(李文荣)
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| 出版日期 | 2004 |
| 会议日期 | August 26-31, 2004 |
| 会议地点 | Chengdu, China |
| 关键词 | Nanomanipulation System 3d Nano Forces Sensing Lateral Error Compensating Of Probe Positioning |
| 页码 | 18-22 |
| 英文摘要 | In the AFM based nanomanipulation, the main problem is the lack of real-time sensory feedback for an operator, which makes the manipulation almost in the dark and inefficient. For solving this problem, the AFM probe micro cantilever-tip is used not only as an end effector but also as a 3D nano forces sensor for sensing the interactive nano forces between the AFM probe tip and the object or substrate in nanomanipulation. In addition, for a sample-scanning AFM even with a strain gauge position feedback sensor for x-y close-loop displacement control of sample stage, scanning size error will still be generated, which is destructive to lateral positioning accuracy of AFM probe. For improving probe lateral positioning accuracy, an error compensating method is adopted according to system error quantitative analysis based on the authors' previous work. With 3D nano forces sensing through a haptic/force device and probe positioning accuracy improvement, the efficiency and accuracy of nano manipulation can be significantly improved. Experiments are presented to verify the effectiveness of the nanomanipulation system. |
| 源文献作者 | Hong Kong Univ Sci & Technol, Kagawa Univ, Univ Electro Commun, Natl Nat Sci Fdn China, Shanghai Univ, Harbin Engn Univ, Japan Soc Precis Engn, IEEE Robot & Automat Soc, IEEE Syst, Man & Cybernet Soc, IEEE Shikoku Sect, Chinese Inst Elect, Chinese Soc Mech Engn, China Cleaning Engn Technol Cooperat Assoc, Robot Soc Japan, Int Mechatron Forum, JSPE, Tech Comm Intell Mechatron, Minist Educ, China |
| 产权排序 | 1 |
| 会议录 | PROCEEDINGS OF THE 2004 INTERNATIONAL CONFERENCE ON INTELLIGENT MECHATRONICS AND AUTOMATION
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| 会议录出版者 | IEEE |
| 会议录出版地 | NEW YORK |
| 语种 | 英语 |
| ISBN号 | 0-7803-8748-1 |
| WOS记录号 | WOS:000225452400005 |
| 源URL | [http://ir.sia.cn/handle/173321/8556]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 通讯作者 | Tian XJ(田孝军) |
| 作者单位 | 1.Department of Electrical Engineering, Michigan State University, United States 2.Shenyang Institute of Automation, Chinese Academy of Science, China 3.Graduate School, Chinese Academy of Science, China 4.Department of Automation, Chinese University of Hong Kong, Hong Kong, Hong Kong |
| 推荐引用方式 GB/T 7714 | Tian XJ,Jiao ND,Liu LQ,et al. An AFM based nanomanipulation system with 3D nano forces feedback[C]. 见:. Chengdu, China. August 26-31, 2004. |
入库方式： OAI收割
来源：沈阳自动化研究所
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