Development of AFM based on nano positioning stage
文献类型：会议论文
| 作者 | Jiao ND(焦念东) ; Wang YC(王越超); Dong ZL(董再励)
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| 出版日期 | 2007 |
| 会议日期 | January 16-19, 2007 |
| 会议地点 | Bangkok, THAILAND |
| 关键词 | Afm Kinematic Coupling Nano Positioning Stage Afm Force Curve |
| 页码 | 1171-1175 |
| 英文摘要 | A single PZT (piezoelectric) tube is generally used in atomic force microscope (AFM) as its scanner. But due to the kinematic coupling of the single tube during its bending motion, there usually exist two kinds of structure errors: vertical cross coupling error and scanning size error which affect the precision of nano observation and manipulation. In this paper, a new AFM with nano positioning stage as its scanner is developed. The stage has three PZT actuators and can move in three directions with high precision without kinematic coupling, thus the two structure errors are eliminated effectively in the new AFM. Some development results are presented and the experimental results validate the performance of the AFM. |
| 源文献作者 | IEEE |
| 产权排序 | 1 |
| 会议录 | 2007 2nd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, Vols 1-3
 |
| 会议录出版者 | IEEE |
| 会议录出版地 | NEW YORK |
| 语种 | 英语 |
| ISBN号 | 978-1-4244-0609-8 |
| WOS记录号 | WOS:000248619100258 |
| 源URL | [http://ir.sia.cn/handle/173321/8660]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 作者单位 | 1.Graduate School, Chinese Academy of Sciences, China 2.Shenyang Institute of Automation, Chinese Academy of Sciences, China 3.Department of Electrical Computer Engineering, Michigan State University, United States |
| 推荐引用方式 GB/T 7714 | Jiao ND,Wang YC,Dong ZL. Development of AFM based on nano positioning stage[C]. 见:. Bangkok, THAILAND. January 16-19, 2007. |
入库方式： OAI收割
来源：沈阳自动化研究所
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