Modeling and Analysis of Flexure-based Nano-Positioning Device Driven by Voice Coil Actuator
文献类型：会议论文
| 作者 | Huang, Xiaolu; Yang, Bao; Zhang, Chi; Chen, Silu; Chen, Jinhua; Liao, Youyong |
| 出版日期 | 2018 |
| 会议日期 | JUL 09-12, 2018 |
| 关键词 | MAGNET ARRAY DESIGN SYSTEM MOTOR |
| 英文摘要 | This paper proposes a flexure-based nano-positioning device which can yield +/- 2mm motion range with nearly linear relationship between input current and output displacement. The voice coil actuator (VCA) applies Halbach permanent magnet array whose thrust and force ripple are accurately modeled based on gap magnetic field analysis. The thrust model is verified by Finite Element Analysis (FEA) and VCA parameters are optimized by Genetic Algorithm (GA). The VCA coil skeleton with three coils is supported by flexure-based membranes. The membrane consists of bend segments and torsion segments which are connected in S shape. Equivalent models are applied to predict the stiffness of the membrane. At last, the force-displacement curve of VCA and displacement-force curve of the flexure-based membrane are obtained by experiments. The results validate the correctness of the developed model and the feasibility of the design. |
| 会议录出版者 | IEEE ASME International Conference on Advanced Intelligent Mechatronics |
| 学科主题 | Computer Science ; Engineering |
| ISSN号 | 2159-6255 |
| ISBN号 | 978-1-5386-1854-7 |
| 源URL | [http://ir.nimte.ac.cn/handle/174433/23356]  |
| 专题 | 会议专题 会议专题_会议论文 |
| 推荐引用方式 GB/T 7714 | Huang, Xiaolu,Yang, Bao,Zhang, Chi,et al. Modeling and Analysis of Flexure-based Nano-Positioning Device Driven by Voice Coil Actuator[C]. 见:. JUL 09-12, 2018. |
入库方式： OAI收割
来源：宁波材料技术与工程研究所
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