Atomic force microscope deposition assisted by electric field
文献类型：会议论文
| 作者 | Liu ZL(刘增磊); Jiao ND(焦念东) ; Wang ZD(王志东); Dong ZL(董再励); Liu LQ(刘连庆)
|
| 出版日期 | 2013 |
| 会议名称 | 2013 2nd International Conference on Micro Nano Devices, Structure and Computing Systems, MNDSCS 2013 |
| 会议日期 | January 23-24, 2013 |
| 会议地点 | Shenzhen, China |
| 关键词 | Atomic force microscopy Electric fields Electric properties Field emission Nanostructured materials Nanostructures |
| 页码 | 69-73 |
| 中文摘要 | This paper introduces atomic force microscope (AFM) deposition method to fabricate nanostructures and nanodevices. Field emission theory is introduced in this paper, which provides theoretical explanation for AFM deposition. Dot matrixes are fabricated by AFM deposition on three different substrates, Si, Au and GaAs. Differences of deposition on the three substrates are discussed. AFM deposition has many practical applications. For example, AFM deposition can be used to solder nano components together to improve electrical properties of nanodevices. Besides nanosoldering, AFM deposition can also be used in fabrication of nanodevices. Thus AFM deposition is a valuable research field for future massive applications of nanodevices. |
| 收录类别 | EI |
| 产权排序 | 1 |
| 会议主办者 | International Information Engineering Institute, USA |
| 会议录 | Advanced Materials Research
 |
| 会议录出版者 | Trans Tech Publications |
| 会议录出版地 | Clausthal-Zellerfeld, Germany |
| 语种 | 英语 |
| ISSN号 | 1022-6680 |
| ISBN号 | 978-3-03785-642-0 |
| 源URL | [http://ir.sia.cn/handle/173321/12411]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 推荐引用方式 GB/T 7714 | Liu ZL,Jiao ND,Wang ZD,et al. Atomic force microscope deposition assisted by electric field[C]. 见:2013 2nd International Conference on Micro Nano Devices, Structure and Computing Systems, MNDSCS 2013. Shenzhen, China. January 23-24, 2013. |
入库方式： OAI收割
来源：沈阳自动化研究所
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