A Current Assisted Deposition Method Based on Contact Mode Atomic Force Microscope
文献类型：会议论文
| 作者 | Liu ZL(刘增磊); Jiao ND(焦念东) ; Wang ZD(王志东); Liu LQ(刘连庆)
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| 出版日期 | 2013 |
| 会议名称 | 2013 IEEE International Conference on Cyber Technology in Automation, Control and Intelligent Systems |
| 会议日期 | May 26-29, 2013 |
| 会议地点 | Nanjing, China |
| 关键词 | AFM nano fabrication deposition field emission |
| 页码 | 287-290 |
| 通讯作者 | 刘增磊 |
| 中文摘要 | This paper introduces a novel AFM deposition method. In contrast to traditional method, the method in this paper has two differences. Firstly in our method AFM works in contact mode. AFM tip presses on substrate slightly in contact mode and it does not need to control AFM tip-substrate separation precisely, which makes AFM deposition easy to carry out. Secondly current is applied to AFM tip to induce deposition instead of voltage. By applying current, uniform nanodots can be fabricated repeatedly. Furthermore, nanolines can be fabricated directly in a single action with the method. The method is potential to be used for soldering nanowires or fabricating nanostructures. |
| 收录类别 | EI ; CPCI（ISTP） |
| 产权排序 | 1 |
| 会议录 | Proceedings of the 2013 IEEE International Conference on Cyber Technology in Automation, Control and Intelligent Systems
 |
| 会议录出版者 | IEEE |
| 会议录出版地 | NEW YORK |
| 语种 | 英语 |
| ISBN号 | 978-1-4799-0610-9 |
| WOS记录号 | WOS:000349825000050 |
| 源URL | [http://ir.sia.cn/handle/173321/13892]  |
| 专题 | 沈阳自动化研究所_机器人学研究室 |
| 推荐引用方式 GB/T 7714 | Liu ZL,Jiao ND,Wang ZD,et al. A Current Assisted Deposition Method Based on Contact Mode Atomic Force Microscope[C]. 见:2013 IEEE International Conference on Cyber Technology in Automation, Control and Intelligent Systems. Nanjing, China. May 26-29, 2013. |
入库方式： OAI收割
来源：沈阳自动化研究所
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