中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
机构
采集方式
内容类型
发表日期
学科主题
筛选

浏览/检索结果: 共3条,第1-3条 帮助

条数/页: 排序方式:
Complexing Between Additives and Ceria Abrasives Used for Polishing Silicon Dioxide and Silicon Nitride Films 期刊论文  OAI收割
ELECTROCHEMICAL AND SOLID STATE LETTERS, 2011, 卷号: 14, 期号: 3, 页码: H128-H131
Wang,LY; Liu,B; Song,ZT; Liu,WL; Feng,SL; Huang,D; Babu,SV
收藏  |  浏览/下载:21/0  |  提交时间:2012/04/10
Origin of high oxide to nitride polishing selectivity of ceria-based slurry in the presence of picolinic acid 期刊论文  OAI收割
CHINESE PHYSICS B, 2011, 卷号: 20, 期号: 3, 页码: 38102
Wang,LY; Liu,B; Song,ZT; Liu,WL; Feng,SL; Huang,D; Babu,SV
收藏  |  浏览/下载:17/0  |  提交时间:2012/04/10
Complexing Between Additives and Ceria Abrasives Used for Polishing Silicon Dioxide and Silicon Nitride Films 期刊论文  OAI收割
ELECTROCHEMICAL AND SOLID STATE LETTERS, 2011, 卷号: 14, 期号: 3, 页码: H128-H131
Wang, LY; Liu, B(重点实验室); (重点实验室); song, zt(重点实验室); Liu, WL; Feng, SL(重点实验室); Huang, D; Babu, SV
收藏  |  浏览/下载:19/0  |  提交时间:2013/05/10