中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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Structural, optical properties and band gap alignments of ZrOxNy thin films on Si (1 0 0) by radio frequency sputtering at different deposition temperatures 期刊论文  OAI收割
applied surface science, 2008, 期号: 254
L.Q. Zhu; Q. Fang; X.J. Wang; J.P. Zhang; M. Liu; G.He; L.D. Zhang
收藏  |  浏览/下载:21/0  |  提交时间:2010/07/14
Effect of postdeposition annealing on the thermal stability and structural characteristics of sputtered HfO2 films on Si (100) 期刊论文  OAI收割
surface science, 2005, 期号: 576
G.He; M.Liu; L.Q. Zhu; M.Chang; Q.Fang; L.D. Zhang
收藏  |  浏览/下载:27/0  |  提交时间:2010/08/17