中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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COMPARATIVE INVESTIGATION OF DAMAGE-INDUCED BY DIATOMIC AND MONOATOMIC ION-IMPLANTATION IN SILICON 期刊论文  OAI收割
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1994, 卷号: 85, 期号: 1-4, 页码: 524-527
LOHNER,T; TOTH,Z; FRIED,M; KHANH,NQ; YANG,GQ; LU,LC; Zou,SC; HANEKAMP,LJ; VANSILFHOUT,A; GYULAI,J
收藏  |  浏览/下载:16/0  |  提交时间:2012/03/25
DAMAGE ANNEALING BEHAVIOR IN DIATOMIC PHOSPHORUS ION-IMPLANTED SILICON 期刊论文  OAI收割
RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1990, 卷号: 115, 期号: 1-3, 页码: 183-192
YANG, GQ; KHANH, NQ; FRIED, M; KOTAI, E; SCHILLER, V; LU, LC; GYULAI, J; ZOU, SH
收藏  |  浏览/下载:22/0  |  提交时间:2012/03/25
BOMBARDMENT  SI  GE