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Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
机构
光电技术研究所 [12]
西安光学精密机械研究... [1]
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OAI收割 [13]
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会议论文 [10]
期刊论文 [3]
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2016 [1]
2014 [2]
2013 [2]
2012 [3]
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Control - ... [1]
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Design and simulation of large field plate lithography lens
期刊论文
OAI收割
Proceedings of SPIE: 8th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems; and Smart Structures and Materials, 2016, 卷号: 9685, 页码: 96850V
作者:
Deng, Chao
;
Xing, Tingwen
;
Lin, Wumei
;
Zhu, Xianchang
  |  
收藏
  |  
浏览/下载:25/0
  |  
提交时间:2018/06/14
Fits And Tolerances
Lithography
Manufacture
Materials Testing
Optical Design
Optical Devices
Optical Systems
A hybrid algorithm for the design of diffractive optical element for beam shaping
会议论文
OAI收割
Proceedings of SPIE: 7th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design Manufacturing, and Testing of Micro- and Nano-Optical Devices, and Systems, 2014
作者:
Yin, Kewei
;
Huang, Zhiqiang
;
Lin, Wumei
;
Xing, Tingwen
收藏
  |  
浏览/下载:15/0
  |  
提交时间:2016/11/23
Design of MWIR step-zoom detection imaging system with a large FPA
会议论文
OAI收割
Proceedings of SPIE: 7TH INTERNATIONAL SYMPOSIUM ON ADVANCED OPTICAL MANUFACTURING AND TESTING TECHNOLOGIES: ADVANCED OPTICAL MANUFACTURING TECHNOLOGIES, 2014
作者:
Bai Yu
;
Xing Tingwen
;
Lin Wumei
;
Jiang Yadong
收藏
  |  
浏览/下载:24/0
  |  
提交时间:2016/11/23
Wavefront testing of pinhole based on point diffraction interferometer
会议论文
OAI收割
Proceedings of SPIE: Optical Microlithography XXVI, 2013
作者:
Jia, Xin
;
Xing, Tingwen
;
Xu, Jiajun
;
Lin, Wumei
;
Liao, Zhijie
收藏
  |  
浏览/下载:15/0
  |  
提交时间:2016/11/23
Research on generating various polarization-modes in polarized illumination system
会议论文
OAI收割
Proceedings of SPIE: International Symposium on Photoelectronic Detection and Imaging 2013: Micro/Nano Optical Imaging Technologies and Applications, 2013
作者:
Huang, Jinping
;
Lin, Wumei
;
Fan, Zhenjie
收藏
  |  
浏览/下载:16/0
  |  
提交时间:2016/11/23
Design and analysis of diffractive optical elements for flattening of single modal Gaussian beams
会议论文
OAI收割
Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Design, Manufacturing, and Testing of Smart Structures, Micro- and Nano-Optical Devices, and Systems, 2012
作者:
Yin, Kewei
;
Huang, Zhiqiang
;
Lin, Wumei
;
Xing, Tingwen
收藏
  |  
浏览/下载:16/0
  |  
提交时间:2016/11/23
Compensation method for random drifts of laser beams based on moving average feedback control
会议论文
OAI收割
Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, 2012
作者:
Zhang, Lixia
;
Wang, Ruilin
;
Lin, Wumei
;
Liao, Zhijie
收藏
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浏览/下载:14/0
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提交时间:2016/11/23
Experiment analysis of absolute flatness testing
会议论文
OAI收割
Proceedings of SPIE: Metrology, Inspection, and Process Control for Microlithography XXVI, 2012
作者:
Xin, Jia
;
Xing, Tingwen
;
Lin, Wumei
;
Liao, Zhijie
收藏
  |  
浏览/下载:14/0
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提交时间:2016/11/23
Error Analysis of Absolute Testing based on Even-Odd Functions Method
会议论文
OAI收割
Proceedings of the SPIE - The International Society for Optical Engineering, 2010
作者:
Xin Jia
;
Tingwen Xing
;
Wumei Lin
;
Zhijie Liao
;
Yun Li
收藏
  |  
浏览/下载:17/0
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提交时间:2016/11/23
Shape the unstable laser beam using diffractive optical element Array
会议论文
OAI收割
Proceedings of the SPIE - The International Society for Optical Engineering, 2010
作者:
Yuanyuan Li
;
Chuankai Qiu
;
Pan Li
;
Tingwen Xing
;
Wumei Lin
收藏
  |  
浏览/下载:15/0
  |  
提交时间:2016/11/25