机构

• 光电技术研究所 [12]
• 上海光学精密机械研究... [5]

采集方式

• OAI收割 [17]

内容类型

• 期刊论文 [16]
• 会议论文 [1]

发表日期

• 2015 [4]
• 2012 [8]
• 2011 [2]
• 2009 [1]

学科主题

• Alignment [1]
• Aspherics ... [1]
• Liquid cry... [1]
• Lithograph... [1]

筛选

浏览/检索结果: 共17条，第1-10条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Adjustment Strategy for Inclination Moire Fringes in Lithography by Spatial Frequency Decomposition 期刊论文  OAI收割 IEEE PHOTONICS TECHNOLOGY LETTERS, 2015, 卷号: 27, 期号: 4 作者:  Zhu, Jiangping;  Hu, Song;  Su, Xianyu;  You, Zhisheng 收藏  |  浏览/下载：21/0  |  提交时间：2015/07/10 Proximity lithography  mask-wafer alignment  phase analysis  spatial frequency   Gap-optimized Moire phase imaging alignment for proximity lithography 期刊论文  OAI收割 OPTICAL ENGINEERING, 2015, 卷号: 54, 期号: 1 作者:  Zhu, Jiangping;  Hu, Song;  You, Zhisheng;  Su, Xianyu 收藏  |  浏览/下载：23/0  |  提交时间：2015/07/10 lithography  alignment  Moire techniques   Gap-optimized Moiré phase imaging alignment for proximity lithography 期刊论文  OAI收割 Optical Engineering, 2015, 卷号: 54, 期号: 1, 页码: 17105 作者:  Zhu, Jiangping;  Hu, Song;  You, Zhisheng;  Su, Xianyu 收藏  |  浏览/下载：20/0  |  提交时间：2016/11/23 Adjustment strategy for inclination moiré fringes in lithography by spatial frequency decomposition 期刊论文  OAI收割 IEEE Photonics Technology Letters, 2015, 卷号: 27, 期号: 4 作者:  Zhu, Jiangping;  Hu, Song;  Su, Xianyu;  You, Zhisheng 收藏  |  浏览/下载：22/0  |  提交时间：2016/11/23 Two-dimensional wavelet transform for reliability-guided phase unwrapping in optical fringe pattern analysis 期刊论文  OAI收割 applied optics, 2012, 卷号: 51, 期号: 12, 页码: 2026-2034 Sikun Li; Xiangzhao Wang; Xianyu Su; Feng Tang 收藏  |  浏览/下载：16/0  |  提交时间：2013/09/16 Three-dimensional shape measurement of large-aperture aspheric mirrors by off-axis null Ronchi test 期刊论文  OAI收割 APPLIED OPTICS, 2012, 卷号: 51, 期号: 9, 页码: 1276-1282 作者:  Guo, Chunfeng;  Su, Xianyu;  Chen, Wenjing;  Lei, Baiping;  Wu, Fan 收藏  |  浏览/下载：22/0  |  提交时间：2015/07/10 Quantitative measurement of large-aperture aspheric surfaces by off-axis Ronchi test 期刊论文  OAI收割 OPTICS AND LASERS IN ENGINEERING, 2012, 卷号: 50, 期号: 2, 页码: 165-169 作者:  Guo, Chunfeng;  Su, Xianyu;  Chen, Wenjing;  Lei, Baiping;  Wu, Fan 收藏  |  浏览/下载：22/0  |  提交时间：2015/07/10 Optical testing  Aspheric mirror  Ronchi test  3D surface measurement  Fringe analysis   Three-dimensional shape measurement of large-aperture aspheric mirrors by off-axis null Ronchi test 期刊论文  OAI收割 Applied Optics, 2012, 卷号: 51, 期号: 9, 页码: 1276-1282 作者:  Guo, Chunfeng;  Su, Xianyu;  Chen, Wenjing;  Lei, Baiping;  Wu, Fan 收藏  |  浏览/下载：24/0  |  提交时间：2016/11/22 Reconstructing in laser wavelength scanning interference test of aspheric surface 会议论文  OAI收割 Proceedings of SPIE: 6th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, 2012 作者:  Li, Lulu;  Zhao, Wenchuan;  Su, Xianyu;  Wu, Fan;  Fan, Bin 收藏  |  浏览/下载：16/0  |  提交时间：2016/11/24 Quantitative measurement of large-aperture aspheric surfaces by off-axis Ronchi test 期刊论文  OAI收割 Optics and Lasers in Engineering, 2012, 卷号: 50, 期号: 2, 页码: 165-169 作者:  Guo, Chunfeng;  Su, Xianyu;  Chen, Wenjing;  Lei, Baiping;  Wu, Fan 收藏  |  浏览/下载：18/0  |  提交时间：2016/11/22