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	Ultra-low-distortion optical system design based on tolerance sensitivity optimization 期刊论文 OAI收割 Optics Communications, 2019, 卷号: 437, 页码: 231-236 作者: K.Zhang; X.Zhong; W.Wang; Y.Meng; J.Liu \| 收藏 \| 浏览/下载：34/0 \| 提交时间：2020/08/24 Ultra-low distortion,Optical design,Primary aberration,Tolerance,sensitivity,Optimization,Optics
	Effect of resolution enhancement techniques on aberration sensitivities of arf immersion lithography at 45 mn node 期刊论文 iSwitch采集 Japanese journal of applied physics part 1-regular papers brief communications & review papers, 2007, 卷号: 46, 期号: 5a, 页码: 2936-2940 作者: Li, Yanqiu; Zhang, Fei 收藏 \| 浏览/下载：41/0 \| 提交时间：2019/05/10 Immersion lithography Resolution enhanced technology (ret) Polarization Phase shift mask Aberration sensitivity
	Design of dual-FOV refractive/diffractive LWIR optical system (EI CONFERENCE) 会议论文 OAI收割 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Advanced Optical Manufacturing Technologies, July 8, 2007 - July 12, 2007, Chengdu, China 作者: Wang L.-J.; Zhang J.-P.; Wang L.-J.; Zhang X.; Zhang X. 收藏 \| 浏览/下载：33/0 \| 提交时间：2013/03/25 An infrared-optical zoom system using binary element is proposed in this paper. The two main advantages of the zoom system introducing here are: bigger F-number and lower cost. The primary optical properties are: F/#=1 Second Others zoom ratio =1:4 binary element is used to correct the chromatical aberration by taking the advantage of negative dispersion characteristics and the cost of the system is lower than that of conventional ones with Zinc Selenide (Znse) material at the same level. In the binary element is rotational symmetric with one step which is easy to fabricate in order to balance 5th spherical aberration and dual field are 26.6 and 5.6respectively. Wider field of view is used for search and the smaller one is used for imaging details. This system uses un-cooled infrared detector with 320240 pixels and 45m pixel size. The F-number matches the sensitivity range of the detector array. Three aspects are considered during design process to make the system more satisfactory and more achievable. First 5th coma aberration and 5th astigmatic aberration the manner of zoom is accomplished by exchanging tow lenses into the smaller field of view system layout. The lens exchange manner faces the requirement of simple system structure and good image quality in both focal points. It can also make the system more feasible in the alignment process than mechanical-zooming manner and optical-zooming manner high-order asphere surfaces with 2th order to 10 th order are also hired in the system. Asphere surface is useful in compressing the system and improving optical system transmittance. This kind asphere surface is on industrial level featuring low cost and easy to fabricate. It is shown that good image quality can achieved by implementing five Germanium lenses and the transmittance of system is 72%. All aberrations are diffraction-limited both spherical aberration and astigmatic aberration are corrected. When the field of view(FOV) is 26.6 and the focal length is 152mm MTF at Nyquist frequency(11lp/mm) is great than 0.7. The spherical aberration is -0.0073. The coma aberration is 0.0978 and the astigmatic aberration is -0.013. When the field of view(FOV) is 5.6 and the focal length is 38mm MTF at Nyquist frequency is great than 0.8 with spherical aberration -0.0046 the coma aberration 0.055 and astigmatic aberration 0.034.