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Flow velocity and nutrients affect CO2 emissions from agricultural drainage channels in the North China Plain 期刊论文  OAI收割
ENVIRONMENTAL SCIENCES EUROPE, 2020, 卷号: 32, 期号: 1, 页码: 13
作者:  
Leng, Peifang;  Li, Fadong;  Du, Kun;  Li, Zhao;  Gu, Congke
  |  收藏  |  浏览/下载:31/0  |  提交时间:2021/03/16
Flow velocity and nutrients affect CO2 emissions from agricultural drainage channels in the North China Plain 期刊论文  OAI收割
ENVIRONMENTAL SCIENCES EUROPE, 2020, 卷号: 32, 期号: 1, 页码: 13
作者:  
Leng, Peifang;  Li, Fadong;  Du, Kun;  Li, Zhao;  Gu, Congke
  |  收藏  |  浏览/下载:21/0  |  提交时间:2021/03/16
The automatic photoresist coating machine on the spherical surface (EI CONFERENCE) 会议论文  OAI收割
2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009, August 9, 2009 - August 12, 2009, Changchun, China
作者:  
Li Y.;  Li Y.;  Li Y.;  Li Y.;  Wang H.
收藏  |  浏览/下载:21/0  |  提交时间:2013/03/25
The photoresist coating is an important micro machining process widely applied in engineering. The formed film should be uniform and enough thin to assure the quality of final pattern whose line width is micrometer or nanometer. It is more difficult to process it on the spherical surface than on the flat. In this work  mathematic model of film thickness on the spherical surface is proposed by using hydromechanics. The key factors that influence the film thickness are obtained from the analysis of coating process. Then  the rational parameters which be controlled by the automatic photoresist coating machine can be final set up according to the result of the coating experiments. And the accuracy analysis of the key part which is used for the main process is performed by the error analytics. This machine not only makes the whole coating process automation  but also monitors the film quality in real time. It is adequate for aspheric surface also. 2009 IEEE.  
Automatic spin coater for concave spherical substrate (EI CONFERENCE) 会议论文  OAI收割
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Design, Manufacturing, and Testing of Micro- and Nano-Optical Devices and Systems, July 8, 2007 - July 12, 2007, Chengdu, China
Fengchao L.; Jingsong G.; Xiaoguo F.; Jingli Z.; Zhijun X.; Jun H.; Fenglin X.; Huiqing W.; Xiaohan L.
收藏  |  浏览/下载:23/0  |  提交时间:2013/03/25
Coating photoresist film with uniform thickness on concave spherical substrate (CSS) is very important for microfabrication of concave spherical optical elements by lithography technique via a laser direct writer  for the uneven photoresist film will result in ununiformity of line width so as to influence the characters of optical elements. For improving the uniformity of photoresist film coating on CSS  an automatic spin coater was designed. The process and the mathematical model of spin coating for CSS were analyzed. Difficulties for realizing the spin coater consist of the control of multi-axis motion precisely and collaboratively  valves on/ff properly and real-timely. A flexible and well-behaved spinning motion system was achieved by tmeans of principal and subordinate CPUs control. The motion program for spin coating could be created and implemented automatically while the pressure and the valves were was watched and controlled in real time. Film coating and laser direct writing experiments on a CSS with aperture equals to 100 mm and radius equals to 370 mm were performed. Photoresist film with uniform thickness on CSS was obtained by selecting proper spin coating parameters such as rotational speed  acceleration and viscosity of the photoresist. After development  the section analysis by the atomic force microscope showed that photoresist film thickness was about 517 nm in the center and about 520 nm in the edge of substrate  the film thickness error was within 1%  and the line width was about 6.0 m with steep sides parallel each other. Experimental results indicate that uniform thickness of thin photoresist film has been coated on CSS by the spin coater  which contributes to quality improvement of laser direct writing lines on CSS.  
Material properties test and numerical simulation of impact for die cast magnesium alloy (EI CONFERENCE) 会议论文  OAI收割
International Conference on Magnesium - Science, Technology and Applications, September 20, 2004 - September 24, 2004, Beijing, China
Zeng X.; Wu Q.; Liyuan; Fan J.
收藏  |  浏览/下载:66/0  |  提交时间:2013/03/25