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Chinese Academy of Sciences Institutional Repositories Grid
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Study on gas hydrate dissociation in small bodies of hydrate-bearing sediments under water-heating condition 会议论文  OAI收割
26th Annual International Ocean and Polar Engineering Conference, ISOPE 2016, Rhodes, Greece, June 26, 2016 - July 1, 2016
作者:  
Li P(李鹏);  Zhang XH(张旭辉);  Lu XB(鲁晓兵);  Liu LL(刘乐乐);  Liu CL
收藏  |  浏览/下载:33/0  |  提交时间:2017/05/05
Planar morphology and controlling factors of the gullies in the Yuanmou Dry-hot Valley based on field investigation 期刊论文  OAI收割
JOURNAL OF ARID LAND, 2015, 卷号: 7, 期号: 6, 页码: 778-793
作者:  
Deng Qingchun;  Miao Fang;  Zhang Bin;  Luo Mingliang;  Liu Hui
收藏  |  浏览/下载:38/0  |  提交时间:2015/10/11
Geometrical scaling law for laser shock processing 期刊论文  OAI收割
JOURNAL OF APPLIED PHYSICS, 2013, 卷号: 114, 期号: 4, 页码: 043105/1-043105/9
作者:  
Wu XQ(吴先前);  Tan QM(谈庆明);  Huang CG(黄晨光)
收藏  |  浏览/下载:27/0  |  提交时间:2013/09/27
Nonlinear control design for system with mechanical resonance based on two tracking-differentiators (EI CONFERENCE) 会议论文  OAI收割
2010 IEEE International Conference on Mechatronics and Automation, ICMA 2010, August 4, 2010 - August 7, 2010, Xi'an, China
作者:  
Li J.;  Li Y.;  Li Y.;  Li Y.;  Li Y.
收藏  |  浏览/下载:22/0  |  提交时间:2013/03/25
A nonlinear control strategy for controlling a motion system with mechanical resonance is presented in this paper. A mathematical model of the servo system is derived according to the parameters of an actual system. By using two Tracking-Differentiators  reference input and system output are tracked and their differential signals are given simultaneously. A nonlinear PD control law in velocity loop is designed based on non-smooth feedback. The simulation results show that the control law is superior remarkably in performance to linear PD control law and the classical PID control law. Tracking-Differentiator resolves the contradiction between rapidity and overshoot of system response. The nonlinear PD control law improves system dynamic performance and intensifies the ability of disturbance rejection. The control design achieved in this paper makes the servo system more robust. 2010 IEEE.  
A design of beam shaping unit for 193nm lithography illumination system using angular spectrum theory (EI CONFERENCE) 会议论文  OAI收割
6th International Symposium on Precision Engineering Measurements and Instrumentation, August 8, 2010 - August 11, 2010, Hangzhou, China
作者:  
Zhao Y.;  Zhang W.;  Zhang W.;  Li S.;  Gong Y.
收藏  |  浏览/下载:17/0  |  提交时间:2013/03/25
Off-axis illumination (OAI) technology is widely used to enhance resolution for deep ultraviolet lithography. The realizing methods of OAI include geometrical optics method and physical optics method. However  the former has the disadvantage of weak intensity distribution controlling ability  and the latter introduces simulation errors evidently when dealing with near field diffraction propagation. A diffractive optical element (DOE) designing method using plane wave angular spectrum theory is presented in this paper. Several kinds of OAI modes at near field away from DOE can be realized  and simulation errors and the size of illuminator are also reduced. According to studying the relationships of the sampling point distance of DOE  light beam propagation distance  and the structure of the beam shaping unit  a method of determining the designing parameters is discussed. Using this method  several illumination modes are realized  and simulation results show that all diffraction efficiencies reach up to 84%. The method of DOE manufacturing is analyzed at last  and it is proven to be feasible. 2010 SPIE.  
Fabrication of multilayer laminar grating with high efficiency for extreme ultraviolet (EI CONFERENCE) 会议论文  OAI收割
3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Advanced Optical Manufacturing Technologies, July 8, 2007 - July 12, 2007, Chengdu, China
作者:  
Jin C.-S.;  Zhang L.-C.
收藏  |  浏览/下载:22/0  |  提交时间:2013/03/25
The main goal for investigations on multilayer laminar gratings working at the EUV region is to enhance their efficiency. In this article  second  third  we demonstrate a routine to fabricate multilayer laminar gratings with high efficiency. This routine comprises three steps: first  optimizing fabricating techniques to obtain multilayer coatings with high reflectivity  strictly controlling errors of multilayer grating parameters to ensure the coinciding of the optical performance with the expectation. Results demonstrate that this routine is feasible. The measured peak efficiency of -1 order at 12.8nm was 14.3%. Some related issues about efficiency curves such as wavelength separation and suppression of zero order are discussed.  preparing grating substrates with ideal groove profile and low roughness by holographic recording and ion beam etching process