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	Error compensation of four and five buckets wavefront extraction algorithms in phase-shifting interferometer 期刊论文 OAI收割 OPTIK, 2013, 卷号: 124, 期号: 22, 页码: 5624-5627 作者: Zhu, Mingxin; Bai, Fuzhong 收藏 \| 浏览/下载：21/0 \| 提交时间：2015/04/17 Phase-shifting algorithm Phase extraction Phase shift deviation Detector nonlinearity
	Analysis of measuring errors for the visible light phase-shifting point diffraction interferometer (EI CONFERENCE) 会议论文 OAI收割 2010 OSA-IEEE-COS Advances in Optoelectronics and Micro/Nano-Optics, AOM 2010, December 3, 2010 - December 6, 2010, Guangzhou, China 作者: Zhang Y. 收藏 \| 浏览/下载：25/0 \| 提交时间：2013/03/25 In order to improve the measuring accuracy of the visible light phase-shifting point diffraction interferometer (PS/PDI) for the extreme ultraviolet lithography (EUVL) aspheric mirrors the main measuring errors will be discussed in this paper. At first the elementary configuration and measuring principle of the visible light phase-shifting point diffraction interferometer are introduced briefly then the different errors which are possible to affect the measuring result are summed up the errors include PZT phase-shifting error detector nonlinearity error detector quantization error wavelength instability error and intensity instability error of the laser source vibration error air refractivity instability error and so on. Through detailed analysis and simulation the magnitude of these errors can be obtained. By analysing the reasons which cause these errors and the relationship between these errors and interferometer configuration parameters some methods are put forward to avoid or restrain these errors accordingly.
	Linearity measurement for image-intensified CCD (EI CONFERENCE) 会议论文 OAI收割 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, April 26, 2010 - April 29, 2010, Dalian, China 作者: Zhang L.; Zhao Y.; Zhao Y.; Zhao Y.; Yan F. 收藏 \| 浏览/下载：47/0 \| 提交时间：2013/03/25 To the characteristic of the ultraviolet CCD (UV ICCD) technique of the linearity measurement of the UV ICCD camera is studied based on the theory of radiometry. Approach of linearity measurement is discussed and a kind of measurement system of the UV ICCD has been developed based on the method of neutral density filter. It is very important that the transmittance of the filter is independent of the wavelength in the method of neutral density filter. Black metal screen mesh with different transmittance is used in our system and calibration of the filters' transmittance in different working positions has been done. Meanwhile to assure the uniform of the received radiation on the target of the detector at any test points an integrating sphere is placed behind the neutral filter to balance light. The whole measurement system mainly consists of a deuterium lamp with high stabilization the attenuation film with transmission integrating sphere optical guide and electro-shift platform. Auto control is realized via special software during the test. With this instrument the linearity of the UV ICCD was measured. Experimental results show that the nonlinearity of the UV ICCD under fixed-gain is less than 2% and the uncertainty of measurement system is less than 4%. 2010 Copyright SPIE - The International Society for Optical Engineering.