中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
机构
长春光学精密机械与物... [1]
大连化学物理研究所 [1]
上海光学精密机械研究... [1]
西安光学精密机械研究... [1]
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OAI收割 [4]
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期刊论文 [3]
会议论文 [1]
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2017 [1]
2011 [1]
2005 [1]
2003 [1]
学科主题
光学薄膜 [1]
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E-beam evaporated Nb2O5 as an effective electron transport layer for large flexible perovskite solar cells
期刊论文
OAI收割
NANO ENERGY, 2017, 卷号: 36, 页码: 1-8
作者:
Feng, Jiangshan
;
Yang, Zhou
;
Yang, Dong
;
Ren, Xiaodong
;
Zhu, Xuejie
  |  
收藏
  |  
浏览/下载:29/0
  |  
提交时间:2017/10/29
Perovskite
Solar Cell
E-beam Evaporation
Flexible
Surface modification of SiC mirror by IARE method (EI CONFERENCE)
会议论文
OAI收割
7th International Conference on Thin Film Physics and Applications, September 24, 2010 - September 27, 2010, Shanghai, China
作者:
Gao J.
收藏
  |  
浏览/下载:26/0
  |  
提交时间:2013/03/25
A method to prepare high quality SiC coating at low temperature using large aperture E-beam evaporation PVD equipment with ion assistance was developed for the surface modification of SiC mirror for space projects. This method was called Ion Assisted Reactive Evaporation (IARE). The modified SiC coating was prepared using CH4 and Si with Kaufman ion source by IARE at 300C and it had met the requirements of applications. The SiC coating prepared by this method was amorphous. It was dense
homogeneous and easy to be polished. The surface modification of a SiC mirror was carried out using SiC coating by this method and achieved a fine surface modification effect. The surface roughness (rms) of the SiC substrate was reduced to 0.862nm
the scattering coefficient was reduced to 2.79% and the reflectance coated with Ag film was improved simultaneously after the surface modification. The effect of surface modification using SiC coating was close to that of using Si coating. It can be drawn that this technological method to preparation SiC coating for the surface modification of SiC mirror is reasonable and effective. 2011 SPIE.
Layer uniformity of glancing angle deposition
期刊论文
OAI收割
vacuum, 2005, 卷号: 78, 期号: 1, 页码: 107, 111
Wang JH
;
邵建达
;
Yi K
;
范正修
收藏
  |  
浏览/下载:840/111
  |  
提交时间:2009/09/22
e-beam evaporation
glancing angle deposition
layer uniformity
Cubic MgxZn1-xO films grown on Si(111)
期刊论文
OAI收割
journal of inorganic materials, 2003, 卷号: 18, 期号: 6, 页码: 1385-1388
作者:
Qiu, DJ
收藏
  |  
浏览/下载:32/0
  |  
提交时间:2015/11/12
reactive e-beam evaporation
cubic MgxZn1-xO film