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	Effect of Turntable Structure on Electromechanical Characteristics of Laser Tracker System 会议论文 OAI收割 international symposium on mechanical engineering and material science (ismems), south korea, 2016-11-17 作者: Cao, Erfang; She, Wenji; Zhou, Liang; Zhou, Liang(周亮); Cao, Erfang(曹儿方) 收藏 \| 浏览/下载：26/0 \| 提交时间：2017/03/23 Laser Precision turntable Electromechanical coupling system Response speed Cut-off frequency
	Micro-electro-mechanical systems capacitive ultrasonic transducer with a higher electromechanical coupling coefficient 期刊论文 OAI收割 Micro & Nano Letters, 2015, 卷号: 10, 期号: 10, 页码: 4 作者: Miao, J(苗静); Shen, WJ(沈文江); He, CD; Xue, CY; Xiong, JJ 收藏 \| 浏览/下载：88/0 \| 提交时间：2015/12/31 silicon elemental semiconductors silicon-on-insulator wafer bonding electromechanical effects ultrasonic transducers capacitive transducers micromechanical devices micromachining vibrations membranes finite element analysis reliability capacitance electromechanical coupling coefficient capacitive micromachined ultrasonic transducer impedance matching propagation medium microelectromechanical system capacitive ultrasonic transducer silicon on insulator wafer bonding optimum geometric dimensions membrane mechanical vibration electrical characteristics finite-element analysis operation mode device safety device reliability equivalent stress operation-collapse voltage bottom electrodes glass substrate surface parallel parasitic capacitance Si SiO2
	Modelling and simulation of a two-axis tracking system 期刊论文 OAI收割 proceedings of the institution of mechanical engineers part i-journal of systems and control engineering, 2010, 卷号: 224, 期号: i2, 页码: 125-137 作者: Zhao, Z. M.; Yuan, X. Y.; Guo, Y.; Xu, F.; Li, Z. G. 收藏 \| 浏览/下载：17/0 \| 提交时间：2015/09/18 electromechanical modelling coupling dynamics inverse system method two-axis tracking system