机构

• 光电技术研究所 [2]
• 力学研究所 [1]
• 长春光学精密机械与物... [1]
• 中国科学院大学 [1]
• 沈阳自动化研究所 [1]

采集方式

• OAI收割 [5]
• iSwitch采集 [1]

内容类型

• 期刊论文 [5]
• 会议论文 [1]

发表日期

• 2021 [1]
• 2016 [1]
• 2013 [1]
• 2009 [1]
• 2006 [2]

学科主题

筛选

浏览/检索结果: 共6条，第1-6条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 A multifunctional robotic system toward moveable sensing and energy harvesting 期刊论文  OAI收割 Nano Energy, 2021, 卷号: 89, 页码: 1-14 作者:  Fu, Yiqiang;  Wang HQ(王宏强);  Zi YL(訾云龙);  Liang, Xuanquan   |  收藏  |  浏览/下载：36/0  |  提交时间：2021/08/28 Electrostatic actuator  Electrostatic adhesion  Triboelectric nanogenerator  Vibration energy harvesting  Vibration sensing   A dynamically tunable terahertz metamaterial absorber based on an electrostatic MEMS actuator and electrical dipole resonator array 期刊论文  OAI收割 JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2016, 卷号: 26, 期号: 2 作者:  Hu, Fangrong;  Xu, Ningning;  Wang, Weiming;  Wang, Yue'e;  Zhang, Wentao 收藏  |  浏览/下载：47/0  |  提交时间：2016/06/27 tunable terahertz absorber  metamaterial  microelectromechanical systems (MEMS)  electrical dipole resonator  electrostatic actuator   A Bi-Directional Out-of-Plane Actuator by Electrostatic Force 期刊论文  OAI收割 MICROMACHINES, 2013, 卷号: 4, 期号: 4, 页码: 431-443 作者:  Ren, Hao;  Wang, Weimin;  Tao, Fenggang;  Yao, Jun 收藏  |  浏览/下载：28/0  |  提交时间：2015/04/17 MEMS  out-of-plane actuator  electrostatic repulsive force  bi-directional  microfabrication  adaptive optics   Instability Analysis Of Torsional Mems/Nems Actuators Under Capillary Force 期刊论文  OAI收割 Journal of Colloid and Interface Science, 2009, 卷号: 331, 期号: 2, 页码: 458-462 作者:  Guo JG(郭建刚);  Zhou LJ;  Zhao YP(赵亚溥);  Zhao YP 收藏  |  浏览/下载：1146/143  |  提交时间：2009/08/03 Torsional Nems Actuator  Capillary Force  Instability  Bifurcation  Nanoscale Electrostatic Actuators  Van-Der-Waals  Casimir Force  Stability  Behavior  Plates   Thermally driven micro-electrostatic fieldmeter 期刊论文  iSwitch采集 Sensors and actuators a-physical, 2006, 卷号: 132, 期号: 2, 页码: 677-682 作者:  Chen, Xianxiang;  Peng, Chunrong;  Tao, Hu;  Ye, Chao;  Bai, Qiang 收藏  |  浏览/下载：19/0  |  提交时间：2019/05/10 Mems  Micro-electrostatic fieldmeter  Thermal actuator  Correlation detection   Study of micro-actuator with electrostatic actuating (EI CONFERENCE) 会议论文  OAI收割 ICO20: MEMS, MOEMS, and NEMS, August 21, 2005 - August 26, 2005, Changchun, China 作者:  Liu C.-X.;  Liu C.-X. 收藏  |  浏览/下载：16/0  |  提交时间：2013/03/25 The micro-actuator with the torsion beam and the cantilever beam on silicon is designed and analyzed  which is actuated by electrostatic force. Based on the torsion dynamics theory  the technique and relative formula are presented for analyzing the actuating voltage and the switching time  on which the effect of the air squeeze film damping is already considered. The optimized results of the structural parameters are compared between this technique and the finite element modeling (FEM). The optimized result of parameters is as: length  width and thickness of the torsion beam are 700  12 and 10m  length and width of the cantilever beam are 1900 and 1000m  length and width of the balance beam are 100 and 1000m  and distance of the upper and lower electrodes is 55m  respectively. The actuating voltage is about 50 V  and the switching time Toff and Ton are about 5 and 12 ms  respectively. The computed results show that the air squeeze film damping is an important factor for the study of dynamic response on micro-actuator. Finally  an optical technique is described for the measurement of the actuating voltage and switching time of the device  and the difference between the experimental results and theoretical datum is discussed.