中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
机构
合肥物质科学研究院 [3]
金属研究所 [1]
采集方式
OAI收割 [4]
内容类型
期刊论文 [4]
发表日期
2017 [1]
2016 [2]
2006 [1]
学科主题
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Interface chemistry and electronic structure of ALD-derived HfAlO/Ge gate stacks revealed by X-ray photoelectron spectroscopy
期刊论文
OAI收割
JOURNAL OF ALLOYS AND COMPOUNDS, 2017, 卷号: 716, 期号: 无, 页码: 1-6
作者:
He, Gang
;
Jiang, Shanshan
;
Li, Wendong
;
Zheng, Changyong
;
He, Huaxin
收藏
  |  
浏览/下载:44/0
  |  
提交时间:2018/05/25
High-k Gate Dielectric
Atomic-layer-deposition
Interface Stability
Phase Separation
Annealing Temperature
Annealing Temperature Dependent Electrical Properties and Leakage Current Transport Mechanisms in Atomic Layer Deposition-Derived Al2O3-Incorporated HfO2/Si Gate Stack
期刊论文
OAI收割
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2016, 卷号: 16, 期号: 8, 页码: 8075-8082
作者:
Gao, Juan
;
He, Gang
;
Zhang, Jiwen
;
Chen, Xuefei
;
Jin, Peng
收藏
  |  
浏览/下载:26/0
  |  
提交时间:2017/11/21
High-k Gate Dielectric
Atomic Layer Deposition
Electrical Properties
Leakage Current Mechanism
Modification of electrical properties and carrier transportation mechanism of ALD-derived HfO2/Si gate stacks by Al2O3 incorporation
期刊论文
OAI收割
JOURNAL OF ALLOYS AND COMPOUNDS, 2016, 卷号: 667, 期号: 无, 页码: 352-358
作者:
Gao, Juan
;
He, Gang
;
Sun, Zhaoqi
;
Chen, Hanshuang
;
Zheng, Changyong
收藏
  |  
浏览/下载:26/0
  |  
提交时间:2017/10/18
High-k Gate Dielectric
Atomic-layer-deposition
Electrical Properties
Carrier Transportation Mechanism
Incorporation
Phase separation enhanced interfacial reactions in complex high-k dielectric films
期刊论文
OAI收割
Integrated Ferroelectrics, 2006, 卷号: 86, 页码: 13-19
X. Y. Qiu
;
F. Gao
;
H. W. Liu
;
J. S. Zhu
;
J. M. Liu
收藏
  |  
浏览/下载:18/0
  |  
提交时间:2012/04/14
phase separation
interfacial reaction
high-k dielectric film
pulsed-laser deposition
silicate thin-films
thermal-stability
gate
property
hfo2