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	Finite-element-method study of the effect of thin-film residual stresses on high-order aberrations of deformable mirrors 期刊论文 OAI收割 Surface and Coatings Technology, 2019, 卷号: 366, 页码: 35-40 作者: Zhang, Yaoping; Long, Guoyun; Zhou, Hong; Fan, Junqi; Cui, Hao \| 收藏 \| 浏览/下载：24/0 \| 提交时间：2021/05/06 Residual stresses Deformable mirror High-order aberrations Thin film
	Finite-element-method study of the thermal distortions of deformable mirrors for laser systems 会议论文 OAI收割 Hefei, China, November 26, 2018 - November 28, 2018 作者: Zhang, Yao-Ping; Long, Guo-Yun; Fan, Jun-Qi; Cui, Hao \| 收藏 \| 浏览/下载：7/0 \| 提交时间：2021/05/06 Deformable mirror High-order aberrations Thin film Laser irradiation
	Study on the Effect of Laser Irradiation on High-order Aberrations of Deformable Mirror by FEM 会议论文 OAI收割 Chengdu, PEOPLES R CHINAChengdu, PEOPLES R CHINA, JUN 26-29, 2018JUN 26-29, 2018 作者: Zhang, Yao-ping; Zhou, Hong; Long, Guo-yun; Fan, Jun-qi; Cui, Hao \| 收藏 \| 浏览/下载：13/0 \| 提交时间：2019/08/23 Deformable mirror High-order aberrations Thin film Laser irradiation
	Design of reimaging F/1.0 long-wavelength infrared optical system (EI CONFERENCE) 会议论文 OAI收割 International Symposium on Photoelectronic Detection and Imaging 2011: Advances in Infrared Imaging and Applications, May 24, 2011 - May 24, 2011, Beijing, China 作者: Zhang X.; Zhang X.; Zhang X. 收藏 \| 浏览/下载：36/0 \| 提交时间：2013/03/25 A reimaging F/1.0 long-wavelength infrared optical system is proposed. The design has a flexible opto-mechanical layout. The design process is as follows. Firstly the catadioptric reimaging system consists of two reflecting mirrors and a relay lenses. Two reflecting mirrors make up of the first imaging system and are therefore free of chromatic aberrations while low dispersion lenses were used in the reimaging system so the optical system do not need achromatic design for a high image quality. Then to correct high-order aberrations resulting from large relative aperture more parameters need to be used with aspheric or diffractive surfaces due to modern optic technology development. Here aspheric is selected for easily manufacture. Finally the design is completed with the help of ZEMAX software. The effective focal length of the objective is 120mm and the field of view (FOV) is 4. The simulated final design shows adequate image quality and the modulation transfer function (MTF) is close to diffraction limit. The effect of the surrounding environmental temperature is analyzed using the concept of thermal defocusing and the thermal compensation is discussed. 2011 Copyright Society of Photo-Optical Instrumentation Engineers (SPIE).
	Imaging system effects on the measuring accuracy of the optical surface in interferometer (EI CONFERENCE) 会议论文 OAI收割 3rd International Conference on Measuring Technology and Mechatronics Automation, ICMTMA 2011, January 6, 2011 - January 7, 2011, Shanghai, China Yang W.; Liu M.; Xu W. 收藏 \| 浏览/下载：24/0 \| 提交时间：2013/03/25 In order to measure high accuracy or mid spatial frequency optical surfaces this study investigated imaging system in Fizeau interferometer. Interferometer is a transferring phase information system. General transfer function can't evaluate the ability of imaging system in interferometer that transfers the phase information of the optical surface. So this paper deduced instrument transfer function (ITF) and used ITF to evaluate the phase information transfer ability of interferometer. We obtained some results about ITF of imaging system by numerical simulation when there are different aberrations in imaging system or measuring optical surfaces were different. Our results indicate that ITF can evaluate the ability of transferring phase information in interferometer and the distortion of imaging system evidently affects the accuracy of interferometric measurements. 2010 IEEE.
	Design and tolerance analysis of compensator for high order aspheric surface testing (EI CONFERENCE) 会议论文 OAI收割 2009 International Conference on Optical Instruments and Technology - Optoelectronic Measurement Technology and Systems, October 19, 2009 - October 22, 2009, Shanghai, China 作者: Chen X.; Liu W.; Chen X.; Chen X. 收藏 \| 浏览/下载：28/0 \| 提交时间：2013/03/25 High accuracy is required in surface testing of 90nm nodal point lithography projecting lens. By comparing various aspheric surface testing methods the structure layout of the compensator is a meniscus positive lens combined with a Plano-convex positive lens. The design results indicate that: primary and high order aberrations are balanced well we adopt Offner null compensator to test the aspheric surface in the point diffraction interferometer at last. In this paper MTF exceeds diffraction limit an Offner compensator is presented on the base of the third order aberration theory to test concave aspheric surface root-mean-square (RMS) of wave front error /167. The F-number of the system can achieve F/1.64. By the analysis of the process of aspheric surface testing with the designed system the optical construction parameters of which is determined by introducing equal-quantities spherical aberration to compensate all orders of aspheric coefficients. The field of view of the system is 0.02 a loosen distribution of the tolerance was presented based on the accuracy of measuring apparatus. 2009 SPIE.
	Design of dual-FOV refractive/diffractive LWIR optical system (EI CONFERENCE) 会议论文 OAI收割 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Advanced Optical Manufacturing Technologies, July 8, 2007 - July 12, 2007, Chengdu, China 作者: Wang L.-J.; Zhang J.-P.; Wang L.-J.; Zhang X.; Zhang X. 收藏 \| 浏览/下载：33/0 \| 提交时间：2013/03/25 An infrared-optical zoom system using binary element is proposed in this paper. The two main advantages of the zoom system introducing here are: bigger F-number and lower cost. The primary optical properties are: F/#=1 Second Others zoom ratio =1:4 binary element is used to correct the chromatical aberration by taking the advantage of negative dispersion characteristics and the cost of the system is lower than that of conventional ones with Zinc Selenide (Znse) material at the same level. In the binary element is rotational symmetric with one step which is easy to fabricate in order to balance 5th spherical aberration and dual field are 26.6 and 5.6respectively. Wider field of view is used for search and the smaller one is used for imaging details. This system uses un-cooled infrared detector with 320240 pixels and 45m pixel size. The F-number matches the sensitivity range of the detector array. Three aspects are considered during design process to make the system more satisfactory and more achievable. First 5th coma aberration and 5th astigmatic aberration the manner of zoom is accomplished by exchanging tow lenses into the smaller field of view system layout. The lens exchange manner faces the requirement of simple system structure and good image quality in both focal points. It can also make the system more feasible in the alignment process than mechanical-zooming manner and optical-zooming manner high-order asphere surfaces with 2th order to 10 th order are also hired in the system. Asphere surface is useful in compressing the system and improving optical system transmittance. This kind asphere surface is on industrial level featuring low cost and easy to fabricate. It is shown that good image quality can achieved by implementing five Germanium lenses and the transmittance of system is 72%. All aberrations are diffraction-limited both spherical aberration and astigmatic aberration are corrected. When the field of view(FOV) is 26.6 and the focal length is 152mm MTF at Nyquist frequency(11lp/mm) is great than 0.7. The spherical aberration is -0.0073. The coma aberration is 0.0978 and the astigmatic aberration is -0.013. When the field of view(FOV) is 5.6 and the focal length is 38mm MTF at Nyquist frequency is great than 0.8 with spherical aberration -0.0046 the coma aberration 0.055 and astigmatic aberration 0.034.
	Imaging quality analysis of KBA x-ray microscope working at grazing incidence (EI CONFERENCE) 会议论文 OAI收割 Optical Design and Testing II, November 8, 2004 - November 11, 2004, Beijing, United states 作者: Zhao L. 收藏 \| 浏览/下载：25/0 \| 提交时间：2013/03/25 In the latest 20 years x-ray imaging technology has developed fast in order to meet the need of x-ray photo-etching spatial exploration technology high-energy physics procedure diagnosis of inertial confinement fusion (ICF) et al. Since refractive index of materials in the x-ray region is lower than 1 and x-ray is strongly absorbed by materials it is very difficult to image objects in the x-ray region. Conventional imaging methods are hardly suitable to x-ray range. In general grazing reflective imaging and coding aperture imaging methods have been adopted more and more. In this paper according to user's requirement we have designed a non-coaxial grazing KBA microscope. The microscope consists of two sets of perpendicular spherical mirrors each set includes two parallel mirrors. Taking it as an example we have compiled an optical computing program for the non-coaxial grazing imaging systems so as to analyze and evaluate aberrations of KBA microscope. Thus it can help us to get an optimal comprehension of KBA x-ray imaging system. In the same time the analytical results provide reliable foundation for evaluating imaging quality of KBA microscope.