机构

• 力学研究所 [1]
• 金属研究所 [1]
• 长春光学精密机械与物... [1]
• 过程工程研究所 [1]
• 半导体研究所 [1]

采集方式

• OAI收割 [5]

内容类型

• 期刊论文 [4]
• 会议论文 [1]

发表日期

• 2020 [1]
• 2018 [1]
• 2008 [2]
• 2007 [1]

学科主题

• Materials ... [1]
• Metallurgy... [1]
• Nanoscienc... [1]
• 半导体材料 [1]

筛选

浏览/检索结果: 共5条，第1-5条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Co-sputtered Pd/SnO2:NiO heterostructured sensing films for MEMS-based ethanol sensors 期刊论文  OAI收割 MATERIALS LETTERS, 2020, 卷号: 273, 页码: 4 作者:  Wang, Y.;  Tong, W. G.;  Han, N.   |  收藏  |  浏览/下载：40/0  |  提交时间：2020/07/23 Pd/SnO2  NiO thin films  Composite materials  Sputtering  Ethanol gas detection  XPS  MEMS gas sensor   Enhancing fatigue strength of high-strength ultrafine-scale Cu/Ni laminated composites 期刊论文  OAI收割 MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2018, 卷号: 714, 页码: 43-48 作者:  Wang, YC;  Liang, F;  Tan, HF;  Zhang, B;  Zhang, GP   |  收藏  |  浏览/下载：37/0  |  提交时间：2018/06/05 Dissimilar Elastic-materials  High-cycle Fatigue  Mems Thin-films  Crack Deflection  Copper-films  Nanocrystalline Metals  Length-scale  Liga Nickel  Behavior  Fine   Proposal and investigation for a planar MOEMS 18 wavelength-selective switch (EI CONFERENCE) 会议论文  OAI收割 MEMS/MOEMS Technologies and Applications III, November 12, 2007 - November 14, 2007, Beijing, China 作者:  Li W.;  Li W. 收藏  |  浏览/下载：100/0  |  提交时间：2013/03/25 This paper presents a new wavelength-selective switch by combining silicon micromaching and microassembly techniques. The 18 wavelength-selective switch (WSS) based on micro electro mechanical systems (MEMS) technology is proposed and fabricated with micro electromagnetic actuators  8 WXC prototype node is implemented by using 18 WSSs as building elements. The working principle and the configuration of the micro electromagnetic actuator are illuminated. By analysis  reflecting prisms and narrow-band thin films filters. And a 8  the property suits for the application when the inputs are 2V  and the best fiber-to-fiber insertion loss 5dB is gotten.   Fracture properties of silicon carbide thin films by bulge test of long rectangular membrane 期刊论文  OAI收割 journal of microelectromechanical systems, 2008, 卷号: 17, 期号: 2, 页码: 453-461 Zhou, W; Yang, JL; Sun, GS; Liu, XF; Yang, FH; Li, JM 收藏  |  浏览/下载：57/0  |  提交时间：2010/03/08 bulge test  fracture property  microelectromechanical systems (MEMS)  silicon carbide (SiC) thin films  Weibull distribution function   A moving-coil designed micro-mechanics tester with application on MEMS 期刊论文  OAI收割 Measurement Science & Technology, 2007, 卷号: 18, 期号: 11, 页码: 3612-3616 作者:  Huan Y(郇勇);  Zhang TH(张泰华);  Yang YM(杨业敏) 收藏  |  浏览/下载：777/63  |  提交时间：2009/08/03 Micro-Mechanics  Tester  Design  Mems  Thin-Films  Mechanical-Properties  Nanoindentation Technique