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浏览/检索结果: 共13条，第1-10条 帮助

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Near-field imaging of periodic interfaces in multilayered media 期刊论文  OAI收割
INVERSE PROBLEMS, 2016, 卷号: 32, 期号: 3, 页码: 26
作者:  Yang, Jiaqing;  Zhang, Bo;  Zhang, Ruming
  |  收藏  |  浏览/下载：31/0  |  提交时间：2018/07/30
A comparative study of highly underexpanded nitrogen and hydrogenjets using large eddy simulation 会议论文  OAI收割
20th AIAA International Space Planes and Hypersonic Systems and Technologies Conference, 2015, Glasgow, United kingdom, July 6, 2015 - July 9, 2015
作者:  Li XP(李晓鹏);  Wu K(吴坤);  Yao W(姚卫);  Fan XJ(范学军)
收藏  |  浏览/下载：40/0  |  提交时间：2017/05/05
A design of beam shaping unit for 193nm lithography illumination system using angular spectrum theory (EI CONFERENCE) 会议论文  OAI收割
6th International Symposium on Precision Engineering Measurements and Instrumentation, August 8, 2010 - August 11, 2010, Hangzhou, China
作者:  Zhao Y.;  Zhang W.;  Zhang W.;  Li S.
收藏  |  浏览/下载：20/0  |  提交时间：2013/03/25
Off-axis illumination (OAI) technology is widely used to enhance resolution for deep ultraviolet lithography. The realizing methods of OAI include geometrical optics method and physical optics method. However  the former has the disadvantage of weak intensity distribution controlling ability  and the latter introduces simulation errors evidently when dealing with near field diffraction propagation. A diffractive optical element (DOE) designing method using plane wave angular spectrum theory is presented in this paper. Several kinds of OAI modes at near field away from DOE can be realized  and simulation errors and the size of illuminator are also reduced. According to studying the relationships of the sampling point distance of DOE  light beam propagation distance  and the structure of the beam shaping unit  a method of determining the designing parameters is discussed. Using this method  several illumination modes are realized  and simulation results show that all diffraction efficiencies reach up to 84%. The method of DOE manufacturing is analyzed at last  and it is proven to be feasible. 2010 SPIE.  
The transmission enhancement of a THz pulse through an Ag/Ag2O layer detected by terahertz time-domain spectroscopy 期刊论文  OAI收割
CHINESE PHYSICS B, 2009, 卷号: 18, 期号: 7, 页码: 2785
Chen, H; Wang, L
收藏  |  浏览/下载：20/0  |  提交时间：2013/09/23
Low-Power Super-resolution Readout with Antimony Bismuth Alloy Film as Mask layer 期刊论文  OAI收割
chin. phys. lett., 2009, 卷号: 26, 期号: 2, 页码: 24214
Jiang Lai-Xin; Wu Yi-Qun; Wang Yang; Wei Jing-Song; Gan Fu-Xi
收藏  |  浏览/下载：1894/217  |  提交时间：2009/09/22
超分辨近场结构中Bubble微结构的远场光学特性分析 期刊论文  OAI收割
光子学报, 2008, 卷号: 37, 期号: 1, 页码: 177, 180
瞿青玲; 王阳; 干福熹
收藏  |  浏览/下载：1417/281  |  提交时间：2009/09/22
超分辨近场结构中二元共晶合金掩膜的工作机制 期刊论文  OAI收割
中国激光, 2007, 卷号: 34, 期号: 4, 页码: 530, 533
瞿青玲; 王阳; 干福熹
收藏  |  浏览/下载：1637/295  |  提交时间：2009/09/22
Plasmon-related optical properties of unpenetrated metallic periodic structures 期刊论文  OAI收割
OPTICAL MATERIALS, 2006, 卷号: 29, 期号: 2-3, 页码: 211-215
作者:  Luo, Xiangang;  Ma, Junxian;  Ishihara, Terry
收藏  |  浏览/下载：37/0  |  提交时间：2015/09/21
Investigation on the static recording characteristic of super-resolution near-field structure with antimony mask layer 期刊论文  OAI收割
solid state commun., 2005, 卷号: 134, 期号: 6, 页码: 375, 379
Zhang F; 徐文东; Wang Y; 干福熹
收藏  |  浏览/下载：1610/269  |  提交时间：2009/09/22
Dynamic readout of subdiffraction-limited pit arrays with a silver superlens 期刊论文  OAI收割
appl. phys. lett., 2005, 卷号: 87, 期号: 21, 页码: 211101
魏劲松; 干福熹
收藏  |  浏览/下载：2026/332  |  提交时间：2009/09/22