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Chinese Academy of Sciences Institutional Repositories Grid
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In Situ Cell Detection Using Terahertz Near-Field Microscopy 期刊论文  OAI收割
IEEE TRANSACTIONS ON TERAHERTZ SCIENCE AND TECHNOLOGY, 2022, 卷号: 12, 期号: 5, 页码: 457-463
作者:  
Li, Zaoxia;  Zang, Ziyi;  Wang, Jie;  Lu, Xingxing;  Yang, Zhongbo
  |  收藏  |  浏览/下载:45/0  |  提交时间:2022/10/14
Analysis of a diffractive microlens using the finite-difference time-domain method (EI CONFERENCE) 会议论文  OAI收割
作者:  
Liu Y.;  Liu H.;  Liu H.;  Liu H.;  Liu Y.
收藏  |  浏览/下载:27/0  |  提交时间:2013/03/25
The finite-difference time-domain (FDTD) method is used as rigorous electromagnetic analysis model to calculate the field for a diffractive microlens (DML). The FDTD is used for the entire solution rather than using a near- to far-field propagation method to obtain the far-field energy distribution  thus  all the results are vector based. We derived a formula to calculate the magnitude of electric field  which is time dependent and can be used to graphically show the light wave propagation and focusing process through a DML. Both the comparison and the integral methods are presented to obtain wave amplitude in full solution space  and the distribution of light energy behind a DML is illustrated based on the wave amplitude. The formula of diffractive efficiency of the DML is derived from a time-averaged Ponyting vector  which can indicate the propagation direction of light energy. Application of these formulations in the analysis of a DML example demonstrates the high accuracy and efficiency of our method. 2010 Society of Photo-Optical Instrumentation Engineers.  
A design of beam shaping unit for 193nm lithography illumination system using angular spectrum theory (EI CONFERENCE) 会议论文  OAI收割
6th International Symposium on Precision Engineering Measurements and Instrumentation, August 8, 2010 - August 11, 2010, Hangzhou, China
作者:  
Zhao Y.;  Zhang W.;  Zhang W.;  Li S.;  Gong Y.
收藏  |  浏览/下载:17/0  |  提交时间:2013/03/25
Off-axis illumination (OAI) technology is widely used to enhance resolution for deep ultraviolet lithography. The realizing methods of OAI include geometrical optics method and physical optics method. However  the former has the disadvantage of weak intensity distribution controlling ability  and the latter introduces simulation errors evidently when dealing with near field diffraction propagation. A diffractive optical element (DOE) designing method using plane wave angular spectrum theory is presented in this paper. Several kinds of OAI modes at near field away from DOE can be realized  and simulation errors and the size of illuminator are also reduced. According to studying the relationships of the sampling point distance of DOE  light beam propagation distance  and the structure of the beam shaping unit  a method of determining the designing parameters is discussed. Using this method  several illumination modes are realized  and simulation results show that all diffraction efficiencies reach up to 84%. The method of DOE manufacturing is analyzed at last  and it is proven to be feasible. 2010 SPIE.  
Rigorous vector analysis of diffractive microlens by using of finitedifference time-domain method (EI CONFERENCE) 会议论文  OAI收割
2009 International Conference on Optical Instruments and Technology, OIT 2009, October 19, 2009 - October 22, 2009, Shanghai, China
作者:  
Liu Y.;  Liu H.;  Liu H.;  Liu H.;  Liu Y.
收藏  |  浏览/下载:31/0  |  提交时间:2013/03/25
We use finite difference time domain (FDFD) method as rigorous vector analysis model to simulate the focusing process of diffractive microlens (DML). Differing with most analysis model which the near field distributions are calculated by FDTD and then far field are obtained by using of propagation method  we obtain the fields in whole computational space by using of FDTD only. The advantages are that all the results are vector based and the computational time is saved greatly. In this paper  we present two methods to obtain wave amplitude  one is comparison method  and the other is integral method. Depending on wave amplitude in the whole computational space  one can conveniently obtain distributions of electric field intensity and calculate the time-average Poynting vector. We also present the formulation for calculating diffractive efficiency of DML based on time-average Poynting vector which denotes energy flow. As demonstration  a DML is analyzed by using of these algorithms. The time depended graphic results of FDTD show the process of wave propagation. The distribution of electric field intensity illustrates the focusing of the normal incident light. The focus pattern in the focal plane is also show. The diffractive efficiency of the DML is calculated by using of the energy flow method in this paper. The results show the high accuracy and efficiency of the model. 2009 SPIE.  
全内反射式衍射光栅近场光学特性 期刊论文  OAI收割
强激光与粒子束, 2007, 卷号: 19, 期号: 9, 页码: 1413, 1416
周平和; 王少华; 刘世杰; 邵建达
收藏  |  浏览/下载:729/164  |  提交时间:2009/09/22