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CAS IR Grid
机构
长春光学精密机械与物... [3]
重庆绿色智能技术研究... [1]
上海光学精密机械研究... [1]
采集方式
OAI收割 [5]
内容类型
会议论文 [3]
期刊论文 [2]
发表日期
2022 [1]
2010 [2]
2009 [1]
2007 [1]
学科主题
光学薄膜 [1]
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In Situ Cell Detection Using Terahertz Near-Field Microscopy
期刊论文
OAI收割
IEEE TRANSACTIONS ON TERAHERTZ SCIENCE AND TECHNOLOGY, 2022, 卷号: 12, 期号: 5, 页码: 457-463
作者:
Li, Zaoxia
;
Zang, Ziyi
;
Wang, Jie
;
Lu, Xingxing
;
Yang, Zhongbo
  |  
收藏
  |  
浏览/下载:45/0
  |  
提交时间:2022/10/14
Biowater distribution
cellular heterogeneity
in situ detection
near-field imaging
terahertz (THz)
Analysis of a diffractive microlens using the finite-difference time-domain method (EI CONFERENCE)
会议论文
OAI收割
作者:
Liu Y.
;
Liu H.
;
Liu H.
;
Liu H.
;
Liu Y.
收藏
  |  
浏览/下载:27/0
  |  
提交时间:2013/03/25
The finite-difference time-domain (FDTD) method is used as rigorous electromagnetic analysis model to calculate the field for a diffractive microlens (DML). The FDTD is used for the entire solution rather than using a near- to far-field propagation method to obtain the far-field energy distribution
thus
all the results are vector based. We derived a formula to calculate the magnitude of electric field
which is time dependent and can be used to graphically show the light wave propagation and focusing process through a DML. Both the comparison and the integral methods are presented to obtain wave amplitude in full solution space
and the distribution of light energy behind a DML is illustrated based on the wave amplitude. The formula of diffractive efficiency of the DML is derived from a time-averaged Ponyting vector
which can indicate the propagation direction of light energy. Application of these formulations in the analysis of a DML example demonstrates the high accuracy and efficiency of our method. 2010 Society of Photo-Optical Instrumentation Engineers.
A design of beam shaping unit for 193nm lithography illumination system using angular spectrum theory (EI CONFERENCE)
会议论文
OAI收割
6th International Symposium on Precision Engineering Measurements and Instrumentation, August 8, 2010 - August 11, 2010, Hangzhou, China
作者:
Zhao Y.
;
Zhang W.
;
Zhang W.
;
Li S.
;
Gong Y.
收藏
  |  
浏览/下载:17/0
  |  
提交时间:2013/03/25
Off-axis illumination (OAI) technology is widely used to enhance resolution for deep ultraviolet lithography. The realizing methods of OAI include geometrical optics method and physical optics method. However
the former has the disadvantage of weak intensity distribution controlling ability
and the latter introduces simulation errors evidently when dealing with near field diffraction propagation. A diffractive optical element (DOE) designing method using plane wave angular spectrum theory is presented in this paper. Several kinds of OAI modes at near field away from DOE can be realized
and simulation errors and the size of illuminator are also reduced. According to studying the relationships of the sampling point distance of DOE
light beam propagation distance
and the structure of the beam shaping unit
a method of determining the designing parameters is discussed. Using this method
several illumination modes are realized
and simulation results show that all diffraction efficiencies reach up to 84%. The method of DOE manufacturing is analyzed at last
and it is proven to be feasible. 2010 SPIE.
Rigorous vector analysis of diffractive microlens by using of finitedifference time-domain method (EI CONFERENCE)
会议论文
OAI收割
2009 International Conference on Optical Instruments and Technology, OIT 2009, October 19, 2009 - October 22, 2009, Shanghai, China
作者:
Liu Y.
;
Liu H.
;
Liu H.
;
Liu H.
;
Liu Y.
收藏
  |  
浏览/下载:31/0
  |  
提交时间:2013/03/25
We use finite difference time domain (FDFD) method as rigorous vector analysis model to simulate the focusing process of diffractive microlens (DML). Differing with most analysis model which the near field distributions are calculated by FDTD and then far field are obtained by using of propagation method
we obtain the fields in whole computational space by using of FDTD only. The advantages are that all the results are vector based and the computational time is saved greatly. In this paper
we present two methods to obtain wave amplitude
one is comparison method
and the other is integral method. Depending on wave amplitude in the whole computational space
one can conveniently obtain distributions of electric field intensity and calculate the time-average Poynting vector. We also present the formulation for calculating diffractive efficiency of DML based on time-average Poynting vector which denotes energy flow. As demonstration
a DML is analyzed by using of these algorithms. The time depended graphic results of FDTD show the process of wave propagation. The distribution of electric field intensity illustrates the focusing of the normal incident light. The focus pattern in the focal plane is also show. The diffractive efficiency of the DML is calculated by using of the energy flow method in this paper. The results show the high accuracy and efficiency of the model. 2009 SPIE.
全内反射式衍射光栅近场光学特性
期刊论文
OAI收割
强激光与粒子束, 2007, 卷号: 19, 期号: 9, 页码: 1413, 1416
周平和
;
王少华
;
刘世杰
;
邵建达
收藏
  |  
浏览/下载:729/164
  |  
提交时间:2009/09/22
全内反射
衍射光栅
电场增强
损伤阈值
近场分布
Total internal reflection
Diffraction grating
Electric field enhancement
Damage threshold
Near-field distribution