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	Large diameter optics support optimization based on finite element method and optical surface fitting with zernike method 会议论文 OAI收割 Shanghai, China, 2020-06-29 作者: Liang-Xiao, Zhao; Jian, Zhang; San-Feng, Hao; Li-Min, Gao \| 收藏 \| 浏览/下载：24/0 \| 提交时间：2021/03/04 Large diameter optics mirror Support optimization Finite element method Optical surface fitting
	Correction of Static Pointing Error of a Novel Optical Testing Target 期刊论文 OAI收割 Binggong Xuebao/Acta Armamentarii, 2019, 卷号: 40, 期号: 5, 页码: 1030-1037 作者: S.Zhang; X.Xue; Y.Gao; G.Wang \| 收藏 \| 浏览/下载：31/0 \| 提交时间：2020/08/24 Least squares approximations,Error correction,Optical testing,Surface fitting
	Research on automatic Hartmann test of membrane mirror (EI CONFERENCE) 会议论文 OAI收割 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Optical Test and Measurement Technology and Equipment, April 26, 2010 - April 29, 2010, Dalian, China 作者: Zhang P. 收藏 \| 浏览/下载：31/0 \| 提交时间：2013/03/25 Electrostatic membrane mirror is ultra-lightweight and easy to acquire a large diameter comparing with traditional optical elements so its development and usage is the trend of future large mirrors. In order to research the control method of the static stretching membrane mirror the surface configuration must be tested. However membrane mirror's shape is always changed by variable voltages on the electrodes and the optical properties of membrane materials using in our experiment are poor so it is difficult to test membrane mirror by interferometer and null compensator method. To solve this problem an automatic optical test procedure for membrane mirror is designed based on Hartmann screen method. The optical path includes point light source CCD camera splitter and diffuse transmittance screen. The spots' positions on the diffuse transmittance screen are pictured by CCD camera connected with computer and image segmentation and centroid solving is auto processed. The CCD camera's lens distortion is measured and fixing coefficients are given to eliminate the spots' positions recording error caused by lens distortion. To process the low sampling Hartmann test results Zernike polynomial fitting method is applied to smooth the wave front. So low frequency error of the membrane mirror can be measured then. Errors affecting the test accuracy are also analyzed in this paper. The method proposed in this paper provides a reference for surface shape detection in membrane mirror research. 2010 Copyright SPIE - The International Society for Optical Engineering.
	Configuring an electrostatic membrane reflector with potentials exerted on distributed electrodes (EI CONFERENCE) 会议论文 OAI收割 2009 IEEE International Conference on Mechatronics and Automation, ICMA 2009, August 9, 2009 - August 12, 2009, Changchun, China 作者: Zhang P.; Shi G. 收藏 \| 浏览/下载：19/0 \| 提交时间：2013/03/25 Electrostatic membrane reflector (EMR) is very promised for optical quality application with the merits of utra-lightweight and flexible. Configuring a circular membrane reflector with electrostatic potentials exerted on distributed electrodes can approximatively produce a parabolic shape. A 300mm EMR (made from polyimide) stretched by distributed electrodes below is designed and the number of concentric electrodes needed for membrane shape forming is analysed. First based on an analytical solution of Poisson's equation determine the membrane control matrix by finding influence functions of 3 concentric electrodes and 6 control points on membrane surface in order to compute the needed voltages exerted on the distributed electrodes by the method of least-squares fitting. Then the final shape solved by finite element analysis with ANSYS is contrasted with the paraboloid and deviates greatly when the central displacement of membrane is beyond 2.5mm but in this range increasing the number of electrodes and control points will get a better shape. The corresponding errors are analyzed and the control method is concluded. Only using the integrated method of analytical computation numerical analysis and experiment the membrane shape of certain central displacement can be exactly predicted and controlled. 2009 IEEE.
	Ion beam sputter deposition of zirconia thin films (EI CONFERENCE) 会议论文 OAI收割 International Symposium on Photoelectronic Detection and Imaging, ISPDI 2007: Optoelectronic System Design, Manufacturing, and Testings, September 9, 2007 - September 12, 2007, Beijing, China 作者: Liu L.; Yang H.; Liu L. 收藏 \| 浏览/下载：21/0 \| 提交时间：2013/03/25 We determined the optical constants (the refractive index n and the extinction coefficient k) of ion beam sputter deposited zirconia thin films with spectroscopic ellipsometry (SE). First we obtained the structure information (the layer thickness surface roughness and layer diffusion) by fitting the grazing x-ray reflection (GXRR) spectra. The fitted surface roughness is verified by atomic force micrometer (AFM) measurement. Second based on the acquired structure information the measured ellipsometry spectra are fitted in the range of 240-800nm at an incident angle of 70.25 degree. The optical constants are solved based on the Tauc-Lorentz dispersion. The optical band gap extracted by SE is 4.79eV. Finally the optical band gap is verified by Taue plot method which is well consistent with that of SE.
	Optical characteristic of ion beam sputter deposited aluminum thin films (EI CONFERENCE) 会议论文 OAI收割 International Symposium on Photoelectronic Detection and Imaging, ISPDI 2007: Optoelectronic System Design, Manufacturing, and Testings, September 9, 2007 - September 12, 2007, Beijing, China 作者: Yang H.; Liu L.; Liu L. 收藏 \| 浏览/下载：28/0 \| 提交时间：2013/03/25 Aluminum is a typical active metal very easy to oxidize. An oxide surface layer of about 2-6nm quickly formed in air which adds difficulty to the optical constants determination. An ex-situ method is used to determine the optical constants of aluminum thin films. First Second Third alumina (Al2O3) thin film is deposited by ion beam sputter deposition. The optical constants and thickness are determined by spectral ellipsoemtry (SE). The thickness is verified by grazing x-ray reflection (GXRR) fitting method Al thin film with an Al2O3 cap layer on top is deposited. This cap layer is of the same deposition condition with the first step. By fitting the GXRR spectra based on the acquired structure information the structure information (the thickness of the aluminum and the cap layer the ellipsometric spectra are fitted. The optical constants of the aluminum layer are extracted with the aid of the Drude model. Finally surface roughness and the diffusion between Al-Al2O 3) is obtained an induced transmission filter (ITF) is designed and deposited.
	Investigation of the precision of curved surface fitting in the measurement of near-cylindrical surfaces' mid-wavelength deformations 期刊论文 iSwitch采集 Acta physica sinica, 2005, 卷号: 54, 期号: 7, 页码: 3144-3148 作者: Xie, BC; Lu, ZW; Li, FY 收藏 \| 浏览/下载：30/0 \| 提交时间：2019/05/10 Optical testing Near-cylindrical surfaces Curved surface fitting