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Chinese Academy of Sciences Institutional Repositories Grid
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CAS IR Grid
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半导体研究所 [5]
合肥物质科学研究院 [4]
化学研究所 [3]
物理研究所 [1]
苏州纳米技术与纳米仿... [1]
光电技术研究所 [1]
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期刊论文 [18]
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2022 [2]
2020 [3]
2016 [1]
2014 [1]
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2012 [1]
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Chemistry [1]
光电子学 [1]
半导体材料 [1]
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Surface Roughening of Pt-Polystyrene Spherical Janus Micromotors for Enhanced Motion Speed
期刊论文
OAI收割
MICROMACHINES, 2022, 卷号: 13
作者:
Zhou, Le
;
Wei, Yi
;
Zhang, Hongwen
;
Huang, Zhulin
;
Zhu, Shuyi
  |  
收藏
  |  
浏览/下载:49/0
  |  
提交时间:2022/05/16
Pt-PS micromotors
plasma etching
surface roughening
Pt-pushed motion
speed enhancement
Morphological and structural damage investigation of nanostructured molybdenum fuzzy surface after pulsed plasma bombardment
期刊论文
OAI收割
CHINESE PHYSICS B, 2022, 卷号: 31
作者:
Luo, Yu-Chuan
;
Yan, Rong
;
Pu, Guo
;
Wang, Hong-Bin
;
Wang, Zhi-Jun
  |  
收藏
  |  
浏览/下载:63/0
  |  
提交时间:2022/05/05
molybdenum nanostructured fuzz
pulsed-H plasma
edge localized mode
etching process
Improvement of GaN plasma etching uniformity by optimizing the coil electrode with plasma simulation and experimental validation
期刊论文
OAI收割
SURFACE & COATINGS TECHNOLOGY, 2020, 卷号: 400
作者:
Xiao, Dezhi
;
Ruan, Qingdong
;
Liu, Liangliang
;
Shen, Jie
;
Cheng, Cheng
  |  
收藏
  |  
浏览/下载:27/0
  |  
提交时间:2020/11/26
GaN
Plasma etching
Inductively-coupled plasma
Field coupling
Uniformity
Plasma simulation
Simulation of Discharge Characteristics for the Plasma Etching of Large Area SiO2 Substrates
期刊论文
OAI收割
JOURNAL OF RUSSIAN LASER RESEARCH, 2020, 卷号: 41, 期号: 3, 页码: 258-267
作者:
Zhang, Jingwen
;
Fan, Bin
;
Li, Zhiwei
;
Gao, Guohan
;
Li, Bincheng
  |  
收藏
  |  
浏览/下载:31/0
  |  
提交时间:2021/05/11
Reactive Ion Etching
Capacitive Coupled Discharge
Fluid Simulation
Discharge Parameter
Large Area Sio2 Substrates
Plasma Radial Uniformity
Facile Synthesis of LaCoO3 with a High Oxygen Vacancy Concentration by the Plasma Etching Technique for High-Performance Oxygen Ion Intercalation Pseudocapacitors
期刊论文
OAI收割
ACS APPLIED ENERGY MATERIALS, 2020, 卷号: 3, 期号: 1, 页码: 300-308
作者:
Guo, Guanlun
;
Ouyang, Kang
;
Yu, Jipan
;
Liu, Yihui
;
Feng, Shuanglong
  |  
收藏
  |  
浏览/下载:25/0
  |  
提交时间:2020/08/24
LaCoO3 nanoparticles
plasma etching technique
oxygen vacancy
pseudocapacitors
anion-intercalation energy storage mechanism
Morphological and Structural Control of Organic Monolayer Colloidal Crystal Based on Plasma Etching and Its Application in Fabrication of Ordered Gold Nanostructured Arrays
期刊论文
OAI收割
CRYSTALS, 2016, 卷号: 6, 期号: 10, 页码: 1-13
作者:
Liu, Guangqiang
;
Cai, Weiping
收藏
  |  
浏览/下载:19/0
  |  
提交时间:2017/10/19
Monolayer Colloidal Crystals
Plasma Etching
Morphological And Structural Manipulation
Gold Nanostructured Arrays
General fabrication of ordered nanocone arrays by one-step selective plasma etching
期刊论文
OAI收割
NANOTECHNOLOGY, 2014, 卷号: 25, 期号: 11
Wang, Q
;
Tian, ZS
;
Li, YL
;
Tian, SB
;
Li, YM
;
Ren, ST
;
Gu, CZ
;
Li, JJ
收藏
  |  
浏览/下载:28/0
  |  
提交时间:2015/04/14
general cones formation
one-step selective plasma etching
methylic CH3+ ions
nano-masking
Investigations on a Multiple Mask Technique to Depress Processing-Induced Damage of ICP-Etched HgCdTe Trenches
期刊论文
OAI收割
J. Electron. Mater, 2013, 卷号: 42, 期号: 11
Z.H. YE
;
W.D. HU
;
W. LEI
;
W. LU
;
L. HE
;
L. YANG
;
P. ZHANG
;
Y. HUANG
;
C. LIN
;
C.H. SUN
;
X.N. HU
;
R.J. DING
;
X.S. CHEN
收藏
  |  
浏览/下载:23/0
  |  
提交时间:2014/11/11
Mercury cadmium telluride (HgCdTe)
processing-induced side-wall damage
inductively coupled plasma (ICP)
high etching selectivity
Large-Area 2D Gold Nanorod Arrays Assembled on Block Copolymer Templates
期刊论文
OAI收割
SMALL, 2013, 卷号: 9, 期号: 4, 页码: 505-510
作者:
Liu, Zhicheng
;
Huang, Haiying
;
He, Tianbai
  |  
收藏
  |  
浏览/下载:16/0
  |  
提交时间:2019/04/09
Block Copolymers
Gold Nanorods
Arrays
Plasma Etching
Templates
Tunable Fabrication of Two-Dimensional Arrays of Polymer Nanobowls for Biomimic Growth of Amorphous Calcium Carbonate
期刊论文
OAI收割
MACROMOLECULAR RAPID COMMUNICATIONS, 2012, 卷号: 33, 期号: 18, 页码: 1562-1567
作者:
Ding, Tao
;
Song, Kai
;
Yang, Guoqiang
;
Tung, Chen-Ho
  |  
收藏
  |  
浏览/下载:20/0
  |  
提交时间:2019/04/09
Colloidal Crystals
Nanobowls
Plasma Etching
Amorphous Calcium Carbonate