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	高衍射效率曲面光栅摆动刻蚀技术研究学位论文 OAI收割中国科学院大学(中国科学院长春光学精密机械与物理研究所): 中国科学院大学(中国科学院长春光学精密机械与物理研究所), 2018 作者: 沈晨 \| 收藏 \| 浏览/下载：19/0 \| 提交时间：2019/09/23 曲面光栅离子束刻蚀机三维工作台凸面光栅摆动刻蚀硅改性RB-SiC
	Experimental investigation on electrical discharge diamond grinding of RB-SiC ceramics 期刊论文 OAI收割 International Journal of Advanced Manufacturing Technology, 2018, 卷号: 94, 期号: 2019-05-08, 页码: 2751-2762 作者: Rao, X. S.; Zhang, F. H.; Li, C.; Li, Y. J. \| 收藏 \| 浏览/下载：50/0 \| 提交时间：2019/09/17 Electrical discharge diamond grinding RB-SiC ceramics Surface quality Material migration bonded silicon-carbide material removal rate surface-roughness spark assistance micro-edm breakdown optimization prediction electrodes composite Automation & Control Systems Engineering
	2m大口径RB-SiC反射镜的磁控溅射改性期刊论文 OAI收割光学精密工程, 2016, 期号: 7, 页码: 1557-1563 作者: 刘震; 高劲松; 刘海; 王笑夷; 王彤彤 \| 收藏 \| 浏览/下载：25/0 \| 提交时间：2017/09/17 光学加工磁控溅射表面改性 Rb-sic 大口径
	长条形扫描反射镜的柔性支撑期刊论文 OAI收割红外与激光工程, 2015, 期号: 12, 页码: 3678-3683 作者: 张雷; 丁亚林; 徐正平; 张洪文; 张健收藏 \| 浏览/下载：33/0 \| 提交时间：2016/07/06 扫描反射镜轻量化柔性支撑 RB-SiC 面形精度
	反应连接230mm口径RB-SiC反射镜期刊论文 OAI收割光学精密工程, 2012, 期号: 11, 页码: 2360-2364 作者: 张斌智; 张舸收藏 \| 浏览/下载：17/0 \| 提交时间：2013/03/11 反应连接碳化硅 RB-SiC反射镜表面轮廓
	Manufacture of 1.2m reaction bonded silicon carbide mirror blank CFID (EI CONFERENCE) 会议论文 OAI收割 5th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Large Mirrors and Telescopes, April 26, 2010 - April 29, 2010, Dalian, China 作者: Zhang G.; Zhang G.; Zhang G. 收藏 \| 浏览/下载：30/0 \| 提交时间：2013/03/25 Silicon carbide (SiC) is a new type candidate material for large-scale lightweight space mirror. Its low thermal distortion high stiffness fine optical quality and dimensional stability make SiC an ideal material for large space born telescope. Since ten years Changchun institute optics fine mechanics and physics (CIOMP) has developed reaction bonded SiC (RB-SiC) technology for space application and can fabricate RB-SiC mirror with scale less than 1.0 meter for telescope. The green body is prepared with gel-casting method which is an attractive new ceramic forming process for making high-quality complex-shaped ceramic parts. And then unmolding drying binder burning out reacting bonded the RB-SiC can be obtained. But with the development of space-born or ground telescope the scale of primary mirror has exceeded 1.0 meter. So CIOMP has developed an assembly technique which called novel reaction-formed joint technology for larger RB-SiC mirror blank. The steps include joining of green bodies with mixture comprised of SiC particles and phenolic resin etc firing machining and sintering. Joining the 1.2 meter RB-SiC mirror blank by the novel reaction-formed joint technology. And testing the welding layer's performance the results show that the thickness of 54-77m the microstructure and thermal property can be comparable to the substrate and the mechanical property are excellent in bending strength of 307MPa. 2010 Copyright SPIE - The International Society for Optical Engineering.
	IAD-Si coatings on RB-SiC space mirrors for ultra-smooth surfaces (EI CONFERENCE) 会议论文 OAI收割 4th International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies, November 19, 2008 - November 21, 2008, Chengdu, China 作者: Xu L.; Wang X.; Wang X.; Wang X.; Zhang F. 收藏 \| 浏览/下载：25/0 \| 提交时间：2013/03/25 To eliminate surface limitation caused by Silicon impurity in RB-SiC space mirrors a relatively thick Si film is deposited on well finished RB-SiC substrate by a new process-ion assisted depositing (IAD) to provide a better polishable surface. Testing results of IAD-Si properties are provided showing that the amorphous film has great thermal shock resistance. Then polishing experiments on 100.5m thick IAD-Si layers are accomplished focusing on smoother surface. Surface figure and micro-roughness of the coating after polished reach 0.026 RMS (=0.6328nm) and less than 0.5nm RMS respectively. Moreover reflectivity of IAD-Si polished surface with reflective films increases higher than 4.5% than that of RB-SiC in 360-1100nm. High reflectivity and desirable thermal property make IAD-Si an attractive coating material for RB-SiC space mirrors. 2009 SPIE.
	Fabrication technique of large-scale lightweight SiC space mirror (EI CONFERENCE) 会议论文 OAI收割 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies, AOMATT 2007: Large Mirrors and Telescopes, July 8, 2007 - July 12, 2007, Chengdu, China 作者: Zhang G.; Zhang G.; Zhang G. 收藏 \| 浏览/下载：21/0 \| 提交时间：2013/03/25 Silicon carbide (SiC) is a new type candidate material for large-scale lightweight space mirror. Its low thermal distortion high stiffness high optical quality and its dimensional stability are better than other traditional optical substrate materials such as ULE Zerodure Beryllium (Be) and so on. In this paper the lightweight silicon carbide space mirror blank was fabricated by reaction sintering. As a space born mirror material silicon carbide must be an optical grade ceramic. So we prepared the silicon carbide green body with gel-casting method. Then some carbon materials were supplemented into the green body which will bring reaction-sintering with silicon in a vacuum furnace during 1500-1600C ultimately the reaction bonded silicon carbide was made. The diameter of SiC space mirror blank we have made is 680mm. If expanding the size of the vacuum furnace bigger mirror blank can be obtained. The test results show that the mechanical and thermal properties of RB-SiC are excellent with bending strength of 350MPa fracture toughness of 4.1 MPa·m1/2 and coefficient of thermal expansion(CET) of 2.6710-6/K. The surface roughness(RMS) could be better than 3nm.
	Manufacturing and Testing SiC Aspherical mirrors in Space telescopes (EI CONFERENCE) 会议论文 OAI收割 ICO20: Optical Devices and Instruments, August 21, 2005 - August 26, 2005, Changchun, China 作者: Fan D.; Zhang X.; Zhang X.; Zhang X. 收藏 \| 浏览/下载：23/0 \| 提交时间：2013/03/25 Reaction Bonded (RB) SiC mirrors due to their excellent specific stiffness and thermal properties have been widely used in space telescopes. However polishing large SiC aspherical mirrors is difficult compared to other materials such as fused silica or Zerodu. In addition surface roughness of the polished SiC mirrors is limited by the defects of the materials and needs to be improved by means of surface coating technique. This paper introduces the current progress of large SiC aspherical mirrors manufacturing and testing in CIOMP. In particular the procedures of making large off-axis aspherical mirrors were discussed in detail. A proprietary computer controlled optical surfacing (CCOS) technique was utilized to grind and polish the mirrors and the computer aided null test was used to measure the surface figure. As results a 600mm class off-axis SiC aspherical mirrors was demonstrated with figure error less than 13nm rms.