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浏览/检索结果: 共45条，第1-10条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 The application of a helicon plasma source in reactive sputter deposition of tungsten nitride thin films 期刊论文  OAI收割 Plasma Science and Technology, 2022, 卷号: 24 作者:  YANG,Yan;  JI,Peiyu;  LI,Maoyang;  YU,Yaowei;  HUANG,Jianjun   |  收藏  |  浏览/下载：25/0  |  提交时间：2022/12/22 helicon wave plasma  reactive sputtering  tungsten nitride  plasma diagnosis   The role of methane in the formation of fullerene-like nanostructure in amorphous carbon film deposited by reactive magnetron sputtering 期刊论文  OAI收割 Diamond & Related Materials, 2020, 期号: 109, 页码: 108018 作者:  Pei LL(裴露露);  Ju PF(鞠鹏飞);  Ji L(吉利);  Li HX(李红轩);  Liu XH(刘晓红)   |  收藏  |  浏览/下载：39/0  |  提交时间：2020/12/03 Methane  Target poisoning  Fullerene-like nanostructure  Hydrogenated carbon films  Reactive magnetron sputtering   反应磁控溅射制备AlN薄膜及其耐腐蚀性能研究 学位论文  OAI收割 北京: 中国科学院大学, 2018 作者:  王雄伟   |  收藏  |  浏览/下载：170/0  |  提交时间：2019/10/31 反应磁控溅射  AlN薄膜  腐蚀  极化曲线  电化学阻抗谱  Reactive magnetron sputtering  AlN film  Corrosion  Polarization curve  Electrochemical impedance spectroscopy   Influence of hysteresis effect on properties of reactively sputtered TiAlSiN films 期刊论文  OAI收割 APPLIED SURFACE SCIENCE, 2018, 卷号: 431, 页码: 160-164 作者:  Gao FY(高方圆);  Li G(李光);  Xia Y(夏原) 收藏  |  浏览/下载：24/0  |  提交时间：2018/02/08 Tialsin Films  Reactive Sputtering  Hysteresis Effect  Plasma Characteristics  Mechanical Properties   Enhanced thermal stability and thermochromic properties of VOx-based thin films by room-temperature magnetron sputtering 期刊论文  OAI收割 SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2018, 卷号: 174, 页码: 102-111 作者:  Zhan, Yongjun;  Xiao, Xiudi;  Lu, Yuan;  Cao, Ziyi;  Qi, Shuai   |  收藏  |  浏览/下载：40/0  |  提交时间：2018/11/21 Vox-rbased Thin Films  Reactive Sputtering  Rapid Thermal Annealing  Thermaochromic Performance  Thermal Stability   Bias voltage dependence of superlubricity lifetime of hydrogenated amorphous carbon films in high vacuum 期刊论文  OAI收割 Tribology International, 2018, 卷号: 117, 页码: 107-111 作者:  Zhang, Kaifeng;  Zhou, Hui;  Cui LC(崔龙辰);  Lu ZB(鲁志斌);  Wang, Xianrong   |  收藏  |  浏览/下载：35/0  |  提交时间：2017/12/18 Polymer-like Carbon Film  Reactive Magnetron Sputtering  Superlubricity  Bias Voltage   Magnetron Sputtering Deposition Cu@Onion-like N-C as High-Performance Electrocatalysts for Oxygen Reduction Reaction 期刊论文  OAI收割 ACS APPLIED MATERIALS & INTERFACES, 2017, 卷号: 9, 期号: 48, 页码: 41945-41954 作者:  Yang, Yifan;  Zheng, Weitao;  Shao, Hongyang;  Zhang, Xiaoming;  Huang, Hao   |  收藏  |  浏览/下载：242/0  |  提交时间：2019/06/20 N-doped Onion-like Carbon  Core-shell Structure  Magnetron Sputtering  Oxygen Reduction Reactive  Nonprecious-metal Catalysts   Effect of carbon content on microstructures, mechanical and tribological properties and thermal stability in WBC films 期刊论文  OAI收割 SURFACE & COATINGS TECHNOLOGY, 2016, 卷号: 271, 页码: 276-285 Liu, Y. M.; Pei, Z. L.; Gong, J.; Sun, C. 收藏  |  浏览/下载：19/0  |  提交时间：2016/08/22 Reactive magnetron sputtering  Nanocomposites  WBC films  Mechanical properties  Tribological properties  Thermal stability   MgO SECONDARY ELECTRON EMISSION FILM PREPARED BY RADIO-FREQUENCY REACTIVE SPUTERRING 期刊论文  OAI收割 ACTA METALLURGICA SINICA, 2016, 卷号: 52, 期号: 1, 页码: 10-16 作者:  Wang Bin;  Xong Liangyin;  Liu Shi   |  收藏  |  浏览/下载：7/0  |  提交时间：2021/02/02 radio-frequency reactive sputtering  thickness of film  surface roughness  secondary electron emission coefficient  resistance to electron beam bombardment   MgO SECONDARY ELECTRON EMISSION FILM PREPARED BY RADIO-FREQUENCY REACTIVE SPUTERRING 期刊论文  OAI收割 ACTA METALLURGICA SINICA, 2016, 卷号: 52, 期号: 1, 页码: 10-16 作者:  Wang Bin;  Xong Liangyin;  Liu Shi   |  收藏  |  浏览/下载：13/0  |  提交时间：2021/02/02 radio-frequency reactive sputtering  thickness of film  surface roughness  secondary electron emission coefficient  resistance to electron beam bombardment