中国科学院机构知识库网格
Chinese Academy of Sciences Institutional Repositories Grid
机构
采集方式
内容类型
发表日期
学科主题
筛选

浏览/检索结果: 共2条,第1-2条 帮助

条数/页: 排序方式:
Theoretical and engineering research on the municipal solid waste plasma gasification 会议论文  OAI收割
International Conference on Thermal Treatment Technologies and Hazardous Waste Combustors 2011, Jacksonville, FL, United states, MAY 10-13, 2011
作者:  
Sheng HZ(盛宏至);  Deng J(邓晶);  Li YJ(李要建);  Xu YX(徐永香);  Sheng HZ(盛宏至)
收藏  |  浏览/下载:50/0  |  提交时间:2013/02/26
In situ monitoring and real-time control of gate hardmask etching in high-volume manufacturing of ICs 期刊论文  OAI收割
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2008, 卷号: 155, 期号: 11, 页码: D699-D702
Chen, L; Jiang, WN; Pao, T; Lin, B; Xu, LD; Ji, GM; Cai, H
收藏  |  浏览/下载:20/0  |  提交时间:2012/03/24