机构

• 半导体研究所 [2]
• 金属研究所 [1]
• 长春光学精密机械与物... [1]

采集方式

• OAI收割 [3]
• iSwitch采集 [1]

内容类型

• 期刊论文 [3]
• 会议论文 [1]

发表日期

• 2011 [1]
• 2009 [3]

学科主题

• 半导体物理 [1]

筛选

浏览/检索结果: 共4条，第1-4条 帮助 条数/页： 5101520253035404550556065707580859095100 排序方式： 请选择题名升序题名降序提交时间升序提交时间降序作者升序作者降序发表日期升序发表日期降序 Roughness analysis of optical surfaces by X-ray scattering (EI CONFERENCE) 会议论文  OAI收割 2011 International Conference on Electronics and Optoelectronics, ICEOE 2011, July 29, 2011 - July 31, 2011, Dalian, China 作者:  Chen B.;  Chen B. 收藏  |  浏览/下载：26/0  |  提交时间：2013/03/25 A grazing incidence x-ray scattering (XRS) method  Order perturbation theory (FOPT)  is stated briefly and an experimental facility based on an improved X-ray diffraction has been introduced  which can work with high performance. The x-ray scattering distributions of two super smooth silicon samples measured at the incidence angle 0.2 degree  as the x-ray wavelength is 0.154 nm  have been given and analyzed by the FOPT to give information about the surface profiles. As a comparison  the root mean square (RMS) surface roughness  grey-scale maps and one-dimensional power spectral density (1D PSD) have been derived from the atomic-force microscope (AFM) data. The results evaluated by FOPT are in good agreement with that of AFM  which indicates that x-ray scattering method is a practical characterization for the investigation of super smooth surfaces. 2011 IEEE.   Growth and characterization of algan/gan heterostructure using unintentionally doped aln/gan superlattices as barrier layer 期刊论文  iSwitch采集 Superlattices and microstructures, 2009, 卷号: 45, 期号: 2, 页码: 54-59 作者:  Zhang, M. L.;  Wang, X. L.;  Xiao, H. L.;  Wang, C. M.;  Yang, C. B. 收藏  |  浏览/下载：36/0  |  提交时间：2019/05/12 Algan/gan heterostructure  Superlattices (sls)  Root mean square roughness (rms)  Sheet resistance   Growth and characterization of AlGaN/GaN heterostructure using unintentionally doped AlN/GaN superlattices as barrier layer 期刊论文  OAI收割 SUPERLATTICES AND MICROSTRUCTURES, 2009, 卷号: 45, 期号: 2, 页码: 54-59 作者:  Zhang, M. L.;  Wang, X. L.;  Xiao, H. L.;  Wang, C. M.;  Yang, C. B.   |  收藏  |  浏览/下载：10/0  |  提交时间：2021/02/02 AlGaN/GaN heterostructure  Superlattices (SLs)  Root mean square roughness (RMS)  Sheet resistance   Growth and characterization of AlGaN/GaN heterostructure using unintentionally doped AlN/GaN superlattices as barrier layer 期刊论文  OAI收割 superlattices and microstructures, 2009, 卷号: 45, 期号: 2, 页码: 54-59 作者:  Zhang ML 收藏  |  浏览/下载：174/57  |  提交时间：2010/03/08 AlGaN/GaN heterostructure  Superlattices (SLs)  Root mean square roughness (RMS)  Sheet resistance